Tungsten silicide films for microwave kinetic inductance detectors

Cecil, T.; Miceli, Antonino; Quaranta, Orlando; Liu, Chian; Rosenmann, Daniel; McHugh, S.; Mazin, Benjamin A.

doi:10.1063/1.4737408

Cited by 22 publications

(19 citation statements)

References 21 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Kinetic Inductance Detectors (KIDs), proposed for the first time in 2003 1 , have developed rapidly over the last decade, and have by now reached performances that make them competitive with respect to other more mature technologies. Thanks to the opportunity to tune their geometry and to choose the material that is most suitable for the specific requirements of the experiment, they have been studied for applications in many astronomical instruments for radiation detection from sub-mm 2 to gamma-ray 3,4 . Recently they have been proposed also for particle detectors applicable to rare-events search such as the direct detection of dark matter 6 , the neutrinoless double beta decay, the direct measurement of the neutrino mass 11,12 and the measurement of the coherent neutrino-nucleus scattering.…”

Section: Introductionmentioning

confidence: 99%

Critical Temperature Tuning of Ti/TiN Multilayer Films Suitable for Low Temperature Detectors

et al. 2014

View full text Add to dashboard Cite

We present our current progress on the design and test of Ti/TiN Multilayer for use in Kinetic Inductance Detectors (KIDs). Sensors based on sub-stoichiometric TiN film are commonly used in several applications. However, it is difficult to control the targeted critical temperature T C , to maintain precise control of the nitrogen incorporation process and to obtain a production uniformity. To avoid these problems we investigated multilayer Ti/TiN films that show a high uniformity coupled with high quality factor, kinetic inductance and inertness of TiN. These features are ideal to realize superconductive microresonator detectors for astronomical instruments application but also for the field of neutrino physics. Using pure Ti and stoichiometric TiN, we developed and tested different multilayer configuration, in term of number of Ti/TiN layers and in term of different interlayer thicknesses. The target was to reach a critical temperature T C around (1 ÷ 1.5) K in order to have a low energy gap and slower recombination time (i.e. low generation-recombination noise). The results prove that the superconductive transition can be tuned in the (0.5 ÷ 4.6) K temperature range by properly choosing the Ti thickness in the (0 ÷ 15) nm range, and the TiN thickness in the (5 ÷ 100) nm range.

show abstract

Section: Introductionmentioning

confidence: 99%

Critical Temperature Tuning of Ti/TiN Multilayer Films Suitable for Low Temperature Detectors

et al. 2014

View full text Add to dashboard Cite

show abstract

“…1-4 Their applications include microwave filters in mobile and satellite communication, [5][6][7][8][9] superconducting qubits, [10][11][12][13][14] circuit quantum electrodynamics, 15,16 radiation detectors, [17][18][19][20][21][22] and parametric amplifiers. 24 Important characteristics of a CPW resonators are its inductances (geometric, kinetic, and total) and attenuation constant.…”

Section: Introductionmentioning

confidence: 99%

Inductances and attenuation constant for a thin-film superconducting coplanar waveguide resonator

Clem

2013

Journal of Applied Physics

View full text Add to dashboard Cite

The geometric, kinetic, and total inductances and the attenuation constant are theoretically analyzed for a thin-film superconducting coplanar waveguide (CPW) resonator consisting of a currentcarrying central conductor, adjacent slots, and ground planes that return the current. The analysis focuses on films of thickness d obeying d < 2λ (λ is the London penetration depth), for which the material properties are characterized by the two-dimensional screening length Λ = 2λ 2 /d. Introducing a cut-off procedure that guarantees that the magnitudes of the currents in the central conductor and the ground planes are equal, new and simpler results are obtained for the kinetic inductance and the attenuation constant for small Λ. Exact results for arbitrary Λ are presented for the geometric, kinetic, and total inductances in the limit of tiny slot widths, and approximate results are presented for arbitrary slot widths.

show abstract

“…The relaxation time of non-equilibrium quasiparticles decreases with increasing temperature (except at the lowest temperatures [17]) and materials with lower T c typically have longer recombination times (tungsten silicide being a notable exception [8,9]). While τ rec can be enhanced by 2∆-phonon reabsorption, which depends on the phonon pair-breaking and escape times [18], the overall temperature dependence will remain that of Eq.…”

mentioning

confidence: 99%

X-ray photon detection using superconducting resonators in thermal quasi-equilibrium

Quaranta

Cecil

Gades

et al. 2013

Supercond. Sci. Technol.

View full text Add to dashboard Cite

Superconducting resonators have to date been used for photon detection in a non-equilibrium manner. In this paper, we demonstrate that such devices can also be used in a thermal quasiequilibrium manner to detect X-ray photons. We have used a resonator to measure the temperature rise induced by an X-ray photon absorbed in normal metal and superconducting absorbers on continuous and perforated silicon nitride membranes. We observed two distinct pulses with vastly different decay times. We attribute the shorter pulses to non-equilibrium quasiparticle relaxation and the longer pulses to a thermal relaxation process. In addition, we have measured the temperature dependence of the X-ray induced temperature rise and decay times. Finally, we have measured the resonator sensitivity and energy resolution. Superconducting resonators used in a thermal quasi-equilibrium manner have the potential to be used for X-ray microcalorimetry. a Electronic address: oquaranta@aps.anl.gov b Electronic address: amiceli@aps.anl.gov 1

show abstract

Tungsten silicide films for microwave kinetic inductance detectors

Cited by 22 publications

References 21 publications

Critical Temperature Tuning of Ti/TiN Multilayer Films Suitable for Low Temperature Detectors

Critical Temperature Tuning of Ti/TiN Multilayer Films Suitable for Low Temperature Detectors

Inductances and attenuation constant for a thin-film superconducting coplanar waveguide resonator

X-ray photon detection using superconducting resonators in thermal quasi-equilibrium

Contact Info

Product

Resources

About