Tuning Metasurface Dimensions by Soft Nanoimprint Lithography and Reactive Ion Etching

Abstract

Metasurfaces are ultrathin and flat layers of subwavelength nanostructures composed of metallic or high‐refractive‐index materials. They can alter lightwave properties effectively and show significant application potential in various nanophotonic technologies. The subwavelength meta‐atoms are generally carved by electron beam lithography or focused ion beam. It is challenging to produce large‐scale metasurface devices at low cost. Herein, the fabrication of low‐cost and large‐area plasmonic and dielectric metasurfaces through a combination of soft nanoimprint lithography and reactive ion etching is reported and the dimension of meta‐atoms by controlling the etching condition carefully and implementing an iterative imprint and etch process is tuned. Such an approach is effective to alter the metasurface resonances and reproduce new structures with minimum cost for wafer‐scale nanophotonics.

Large-area silicon photonic crystal supporting bound states in the continuum and optical sensing formed by nanoimprint lithography

“…The vertical dimension can also be easily controlled by the silicon etching time. Moreover, as discussed before, 30 the silicon etching rate depends on the mask-opening size. A larger opening means a faster gas transport rate and faster etching, thus under the same etching conditions and time, a larger opening will result in a deeper etched depth.…”

“…In our previous work, we proposed a large-area and low-cost method to fabricate a large-area silicon-on-sapphire photonic crystal through a combination of soft nanoimprint SNL and RIE. 30 Here, we apply this approach to form a large area silicon PhC slab and investigate the quasi-BIC resonance based on accidental BIC modes in such a photonic system. The simple periodic nanohole and nanopillar Si PhC slabs explored are illustrated in Fig.…”

Plasmonic nanostructure characterized by deep-neural-network-assisted spectroscopy [Invited]

“…In this work, we choose the large-area, quasi-3D plasmonic nanostructures that can be fabricated by low-cost and highthroughput nanoimprint lithography [15,16,24,25] . This technique allows us to generate hundreds of different experimental samples in a short period of time.…”

Diblock copolymer pattern protection by silver cluster reinforcement

“…[21][22][23] Concerning the use of metals, nanostructured silver (Ag) is of particular interest due to its versatile usage. The optoelectronic properties of Ag on the nanoscale can be exploited in catalysts, 24,25 flexible electrodes, 26 sensors, [27][28][29][30][31][32][33] photonic crystals 34,35 and antibacterial agents. 36,37 Furthermore, it was previously shown that a thin polymer film can be stabilized by the presence of noble metal nanoparticles.…”