2017
DOI: 10.4028/www.scientific.net/msf.897.601
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Tuning Performance of Silicon Carbide Micro-Resonators

Abstract: Silicon carbide microresonators have been designed, fabricated and tested. Three designs have been studied: cantilever, bridge and ring resonators. The devices have been actuated electrothermally and sensed piezoelectrically. The resonant frequency as well as the amount of frequency shift as a function of DC bias voltage for the three designs have been characterized electrically using two-port measurements. It has been found that the DC tuning sensitivities of the ring and bridge resonators (between 58,000 ppm… Show more

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