2018
DOI: 10.1038/s41598-018-21009-5
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Tuning piezoelectric properties through epitaxy of La2Ti2O7 and related thin films

Abstract: Current piezoelectric sensors and actuators are limited to operating temperatures less than ~200 °C due to the low Curie temperature of the piezoelectric material. Strengthening the piezoelectric coupling of high-temperature piezoelectric materials, such as La2Ti2O7 (LTO), would allow sensors to operate across a broad temperature range. The crystalline orientation and piezoelectric coupling direction of LTO thin films can be controlled by epitaxial matching to SrTiO3(001), SrTiO3(110), and rutile TiO2(110) sub… Show more

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Cited by 18 publications
(12 citation statements)
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“…Nominally 50 nm‐thick epitaxial La 2 Ti 2 O 7 thin films were deposited on SrTiO 3 (110) substrates using pulsed laser deposition (PLD) and annealed in air, [ 5 ] as described in Section 4. Ion irradiations were performed using 1 MeV Zr + ions applied 7° off‐normal to three quadrants of the same 1 × 1 cm 2 sample, yielding four conditions spanning 0, 1, 2, and 4 displacements per atom (dpa).…”
Section: Resultsmentioning
confidence: 99%
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“…Nominally 50 nm‐thick epitaxial La 2 Ti 2 O 7 thin films were deposited on SrTiO 3 (110) substrates using pulsed laser deposition (PLD) and annealed in air, [ 5 ] as described in Section 4. Ion irradiations were performed using 1 MeV Zr + ions applied 7° off‐normal to three quadrants of the same 1 × 1 cm 2 sample, yielding four conditions spanning 0, 1, 2, and 4 displacements per atom (dpa).…”
Section: Resultsmentioning
confidence: 99%
“…As shown in Figure 1a,b, the heterostructure before irradiation is fully crystalline and epitaxial, consisting of large regions of the well‐ordered La 2 Ti 2 O 7 monoclinic perovskite‐like layered structure (vertical or horizontal stripe contrast that corresponds to the additional (110) oxygen planes that occur between every four perovskite‐like units of LTO [ 5 ] ), as well as some smaller regions of cubic perovskite LaTiO 3 , a feature present in the X‐ray diffraction data and lower magnification STEM images shown in Figures S1 and S2, Supporting Information. Despite the crystallographic complexity, we do not observe extended defects such as grain boundaries.…”
Section: Resultsmentioning
confidence: 99%
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“…The target materials are then rapidly vaporized and deposited on the substrate as a thin film, as seen in Figure 3b. [ 25c,d,83 ] The use of noncontact laser heating effectively avoids sample contamination to provide films of high quality. In this regard, PLD technology has been widely utilized for preparing biomedical microdevices.…”
Section: Synthesis and Modification Strategiesmentioning
confidence: 99%