Periodic metal nanodisc arrays have the potential to exhibit regularly spaced large local field enhancements, especially when high-Q collective plasmonic grating resonances can be obtained. Here we demonstrate how Laser interference lithography (LIL) as a maskless and high throughput technique can be used to fabricate these on square centimeter areas. The drawback of LIL is the rather fixed ratio of the size of the individual nanostructure (d) to the period of the array (p) of about d/p ∼ 0.5 for the setup used in the current article, thereby, limiting its ability to create resonances with ultra-high quality factors (Q-factors). To improve the Q-factor of the resonances of the arrays, we study the effect of thermal annealing nanodisk arrays fabricated by LIL and a lift off process. The nanodisk arrays with periods of 400 nm and 500 nm exhibited a plasmonic resonance, which was caused by the interaction of the single disk resonance and a (1 0) grating resonance. Annealing for a short duration lowered the d/p ratio from 0.5 to 0.4, and led to smoothening of the disk surfaces and growth of gold grains, resulting in lower ohmic and radiative losses and doubling of the Q-factor of the resonances. Finite element method (FEM) simulations were used to monitor this improvement in material parameters. Annealing for a longer duration disintegrated the nanodisk into several smaller particles while maintaining the overall periodicity of the array. While the plasmonic resonances of the experimentally investigated fragmented disks were basically destroyed, simulation predict that for larger periods fragmented nanodisk arrays (keeping the d/p ∼ 0.4) can exhibit extremely strong and sharp resonances whose Q-factor increases more than 58.4 times compared to the unfragmented discs. In addition, simulations show a massive enhancement of the local electric field promising immense potential for surface enhanced Raman sensing.
