Tuning work function and surface-modified AZO films on FTO substrate to improve the efficiency of thin-film silicon solar cells

Park, Hyeongsik; Lee, Jae-Hyun; Yi, Junsin

doi:10.1007/s10854-023-10438-2

Cited by 1 publication

(1 citation statement)

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“…Previous investigation on Al-doped ZnO (AZO) films demonstrate high transparency across the visible range [16]. They also exhibit extreme chemical stability at high-temperature and in hydrogen plasma environments [17]. Therefore, AZO films are considered promising in optoelectrical devices such as solar cells and liquid crystal displays, among others [18].…”

Section: Introductionmentioning

confidence: 99%

Atomic layer deposition of Al-doped ZnO nanomembrane with in situ monitoring

Wang,

Gu,

Zhao

et al. 2024

Nanotechnology

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Due to shortcomings such as poor homogeneity of Al doping, precisely controlling the thickness, inability to conformally deposit on high aspect ratio devices and high pinhole rate, the applications of Al-doped ZnO (AZO) nanomembrane in integrated optoelectronic devices are remarkably influenced. Here, we report in situ monitoring during the atomic layer deposition (ALD) of AZO nanomembrane by using an integrated spectroscopic ellipsometer. AZO nanomembranes with different compositions were deposited with real-time and precise atomic level monitoring of the deposition process. We specifically investigate the half reaction and thickness evolution during the ALD processes and the influence of the chamber temperature is also disclosed. Structural characterizations demonstrate that the obtained AZO nanomembranes without any post-treatment are uniform, dense and pinhole-free. The transmittances of the nanomembranes in visible range are > 94%, and the optimal conductivity can reach up to 1210 S/cm. The output of current research may pave the way for AZO nanomembrane becoming promising in integrated optoelectronic devices.

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Section: Introductionmentioning

confidence: 99%