With improved gate calibrations reducing unitary errors, we achieve a benchmarked single-qubit gate fidelity of 99.95% with superconducting qubits in a circuit quantum electrodynamics system. We present a method for distinguishing between unitary and non-unitary errors in quantum gates by interleaving repetitions of a target gate within a randomized benchmarking sequence. The benchmarking fidelity decays quadratically with the number of interleaved gates for unitary errors but linearly for non-unitary, allowing us to separate systematic coherent errors from decoherent effects. With this protocol we show that the fidelity of the gates is not limited by unitary errors, but by another drive-activated source of decoherence such as amplitude fluctuations.Accurate characterization of control gates is an essential task for developing any quantum computing device. Quantum process tomography (QPT) [1][2][3] has been the standard method for characterizing quantum gates because, ideally, it produces a full reconstruction of the quantum process. In practice however, QPT suffers from many drawbacks, the most inimical being its exponential scaling in the number of quantum bits (qubits) comprising the system and that it is limited by state preparation and measurement (SPAM) errors. Various methods such as randomized benchmarking (RB) [4][5][6][7] and gate set tomography (GST) [8,9] have recently been developed to help overcome these limitations. RB is both insensitive to SPAM errors and efficient [10]. However, it only extracts a single piece of information, the average gate fidelity. GST on the other hand helps to overcome limitations from SPAM errors by reconstructing an entire library of gates in a self-consistent manner. The price paid for this self-consistent reconstruction is an even worse scaling than QPT.As control calibration techniques continue to improve and quantum gates approach the fidelity required for fault tolerant quantum computation, it becomes both important and difficult to verify the presence of increasingly small errors. Error verification constitutes a critical first step in a debugging routine since different physical mechanisms can lead to different error types. QPT and GST are often poor choices for error verification since they are time consuming and contain so much information that backing out the presence of specific error types on small scales can be a challenge in itself. In addition, SPAM errors in QPT sets a lower limit on the detectable error strengths [8]. At the other end of the spectrum, while standard RB is efficient the information it contains about the gate is typically not enough to perform any sort of useful error verification. An extension of standard RB, interleaved randomized benchmarking, consists of interleaving a target gate in a benchmarking sequence and provides bounds on the error for the gate of interest [11,12]. Interleaved benchmarking can identify gates that are poorly calibrated, but does not reveal if the errors are due to decoherence, over-/underrotations, or offresona...