Turning a machine vision camera into a high precision position and angle encoder: nanoGPS-OxyO

Acher, O.; Nguyen, Thanhliem

doi:10.1117/12.2524938

Cited by 6 publications

(18 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Nano-GPS technology can also be used with straight-through illumination (also called "bright-field" illumination). The authors in [12] reported examples where nanoGPS OxyO scales were read by optical microscopes in bright-field conditions. Bright-field illumination is not affected by shading effects as those reported in Figure 5, and less affected by dust particles.…”

Section: Illumination Conditionsmentioning

confidence: 99%

“…nanoGPS OxyO encoders are very useful as built-in encoders in complex mechanical systems, as they allow the determination of 3 inplane degrees of freedom of a mechanical system [12,13]. Unlike linear and rotary encoders, their integration should be considered at the systemrather than at the component level.…”

Section: Applicationsmentioning

confidence: 99%

“…While the general principle of vision-based 3-degree-of-freedom (3-DOF) position sensors has been documented in works published by different groups, implementations differ depending on intended sensor uses. Sensors based on this principle were developed in the context of microscopy [4,5,12], robotics [8], metrology [6], quality assurance (QA)/quality control (QC) and motion control [10][11][12][13], or general purposes [3,6,9].…”

Section: Introductionmentioning

confidence: 99%

“…HORIBA France developed a vision-based 3-DOF encoder [5,[9][10][11][12] that was designed to provide motion control to scientific instruments and quality-control solutions for motion systems. It is commercially available under trademark nanoGPS OxyO ® .…”

Section: Introductionmentioning

confidence: 99%

“…It is commercially available under trademark nanoGPS OxyO ® . While x, y precision and accuracy of the nanoGPS OxyO ® sensor were already reported in previous works [11,12], the accuracy of the angular measurement has not yet been thoroughly investigated. This paper aims to (a) determine the precision and accuracy of the angular orientation provided by the encoder; and (b) contribute to a better understanding of angle accuracy of vision-based 3-DOF position sensors, as it is, to our knowledge, the first metrological investigation of such a system in terms of angle accuracy.…”

Section: Introductionmentioning

confidence: 99%

See 4 more Smart Citations

Characterization of Angle Accuracy and Precision of 3-Degree-of-Freedom Absolute Encoder Based on NanoGPS OxyO Technology

Pisani

Astrua

Carles

et al. 2020

Sensors

Self Cite

View full text Add to dashboard Cite

An absolute encoder based on vision system nanoGPS OxyO was developed by HORIBA France. This encoder provides three types of position information, namely, two inplane co-ordinates and inplane angular orientation. This paper focuses on the characterization of its angular performance. To this aim, the nanoGPS OxyO system was compared with the national angle standard of the National Metrology Institute of Italy (INRIM) that had evaluated accuracy of about 0.1 µrad. The effect of image size and illumination conditions on angular measurements was studied. Precision better than 10 µrad and accuracy better than 63 µrad over 2π rotation were demonstrated. Moreover, the application of nanoGPS OxyO to the characterization of rotation bearing is presented. Small deviations from pure rotational behavior were evidenced that would have not been possible using laser interferometers. As a consequence of its accuracy and versatility, the nanoGPS OxyO encoder is expected to be useful for laboratory experiments and quality-control tasks.

show abstract

Section: Illumination Conditionsmentioning

confidence: 99%

Section: Applicationsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Characterization of Angle Accuracy and Precision of 3-Degree-of-Freedom Absolute Encoder Based on NanoGPS OxyO Technology

Pisani

Astrua

Carles

et al. 2020

Sensors

Self Cite

View full text Add to dashboard Cite

show abstract

Automated Computer Vision-Enabled Manufacturing of Nanowire Devices

et al. 2022

View full text Add to dashboard Cite

We present a high-throughput method for identifying and characterizing individual nanowires and for automatically designing electrode patterns with high alignment accuracy. Central to our method is an optimized machine-readable, lithographically processable, and multi-scale fiducial marker systemdubbed LithoTagwhich provides nanostructure position determination at the nanometer scale. A grid of uniquely defined LithoTag markers patterned across a substrate enables image alignment and mapping in 100% of a set of >9000 scanning electron microscopy (SEM) images (>7 gigapixels). Combining this automated SEM imaging with a computer vision algorithm yields location and property data for individual nanowires. Starting with a random arrangement of individual InAs nanowires with diameters of 30 ± 5 nm on a single chip, we automatically design and fabricate >200 single-nanowire devices. For >75% of devices, the positioning accuracy of the fabricated electrodes is within 2 pixels of the original microscopy image resolution. The presented LithoTag method enables automation of nanodevice processing and is agnostic to microscopy modality and nanostructure type. Such high-throughput experimental methodology coupled with data-extensive science can help overcome the characterization bottleneck and improve the yield of nanodevice fabrication, driving the development and applications of nanostructured materials.

show abstract

Identifying and fixing in-plane positioning and stability issues on a microscope using machine-readable patterned position scales

Acher,

de Abreu,

Grigoriev

et al. 2023

Sci Rep

Self Cite

View full text Add to dashboard Cite

Investigations of the in-plane positioning capabilities of microscopes using machine-readable encoded patterned scales are presented. The scales have patterns that contain absolute position information, and adequate software accurately determines the in-plane position from the scale images captured by the microscope camera. This makes in-plane positioning experiments simple and fast. The scales and software used in this study are commercially available. We investigated different microscopy systems and found that positioning performance is a system issue that is not determined solely by stage performance. In some cases, our experiments revealed software or hardware glitches that limited the positioning performance, which we easily fixed. We have also shown that it is possible to investigate vibrations using this approach and quantify their impact on image blurring. This is, for example, useful for experimentally determining the settling time after a stage movement.

show abstract

Turning a machine vision camera into a high precision position and angle encoder: nanoGPS-OxyO

Cited by 6 publications

References 4 publications

Characterization of Angle Accuracy and Precision of 3-Degree-of-Freedom Absolute Encoder Based on NanoGPS OxyO Technology

Characterization of Angle Accuracy and Precision of 3-Degree-of-Freedom Absolute Encoder Based on NanoGPS OxyO Technology

Automated Computer Vision-Enabled Manufacturing of Nanowire Devices

Identifying and fixing in-plane positioning and stability issues on a microscope using machine-readable patterned position scales

Contact Info

Product

Resources

About