1998
DOI: 10.1116/1.581199
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Twinned epitaxial layers formed on Si(111)√3×√3-B

Abstract: We investigate the growth process of twinned epitaxial Si layers on Si(111)√3×√3-B and their thermal stability. In the initial growth stages, twinned two-bilayer-high (2-BL-high) and untwinned BL-high islands are formed, and at higher surface B concentration, there are more twinned 2BL islands than untwinned BL islands. Domain boundaries of the √3×√3 reconstruction act as preferential island nucleation sites, especially for untwinned BL islands. Therefore, to grow epitaxial layers twinned with the already-grow… Show more

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Cited by 35 publications
(15 citation statements)
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“…Recently, a remarkable degree of control of twinning and polytype generation was demonstrated in III-V NW systems, 3,4 allowing for pure wurtzite and zinc-blende NWs to be grown, as well as polytype-and twin-superlattices. Polytype formation is less explored in group IV semiconductors, 5,9 although theoretical investigations predict distinct and possibly useful electronic properties. 10,11 It is known that {111} planar faults occur along the growth axis of 〈112〉 oriented Si NWs.…”
mentioning
confidence: 99%
“…Recently, a remarkable degree of control of twinning and polytype generation was demonstrated in III-V NW systems, 3,4 allowing for pure wurtzite and zinc-blende NWs to be grown, as well as polytype-and twin-superlattices. Polytype formation is less explored in group IV semiconductors, 5,9 although theoretical investigations predict distinct and possibly useful electronic properties. 10,11 It is known that {111} planar faults occur along the growth axis of 〈112〉 oriented Si NWs.…”
mentioning
confidence: 99%
“…As reported recently, boron acts there as a subsurfactant by a change of the growth mode towards layerby-layer growth via nucleation of Si islands 4 MLs high [3,4]. The islands are nucleated in twin positions with respect to the substrate resulting in a change of Si epitaxial layer orientation [5,6]. By alternating change of the growth conditions twinning-superlattices were grown.…”
mentioning
confidence: 93%
“…By alternating change of the growth conditions twinning-superlattices were grown. [6,7] This special behavior could open the way to create miscellaneous Si crystal structures (polytypes) with modified physical properties by an artificial stacking of Si MLs in an epitaxial growth process or heterostructures containing different Si polytypes [7]. Although the surface structure of boron covered Si(111) surfaces has been intensively studied, the Si epitaxial growth mode on boron covered Si it not well known.…”
mentioning
confidence: 99%
“…The method is tested on Ge, Si, and GaAs superlattice, since TSL's are presently known to occur in amorphized Ge films,1 artifically grown whiskers,2 and very recently Si-based TSL was successfully demonstrated by boron mediated epitaxial growth. 3 The paper is organized as follows. In Sec.…”
Section: Introductionmentioning
confidence: 99%