2010
DOI: 10.1002/adem.200900221
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Two‐ and Three‐Dimensional Micro‐ and Sub‐Micrometer Periodic Structures Using Two‐Beam Laser Interference Lithography

Abstract: In this study, we present different approaches for the fabrication of two and three dimensional structures using two‐beam interference lithography. The advantages of using more than one irradiation step for the fabrication of complex structures are theoretically demonstrated by avoiding the introduction of line effects. For the fabrication of 3D structures, two alternatives are discussed including a layer by layer approach as well as a multidimensional (non‐orthogonal) interference exposure setup. Finally, an … Show more

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Cited by 27 publications
(19 citation statements)
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“…Given the ease by which such systems can be manufactured, recent advances in the field of manufacturing (e.g., recent work reporting fabrication of two and threedimensional structures based on interference lithography [31] ) and the wide range of applications for auxetic systems, we hope that this work will encourage further developments in this direction and facilitate the mass-production of auxetics. …”
Section: By Joseph N Grima * and Ruben Gattmentioning
confidence: 99%
“…Given the ease by which such systems can be manufactured, recent advances in the field of manufacturing (e.g., recent work reporting fabrication of two and threedimensional structures based on interference lithography [31] ) and the wide range of applications for auxetic systems, we hope that this work will encourage further developments in this direction and facilitate the mass-production of auxetics. …”
Section: By Joseph N Grima * and Ruben Gattmentioning
confidence: 99%
“…We thus engineered special copper surfaces, so-called "contact arrays": copper surfaces were covered by an inert polymer into which arrays of holes less than 1 m in diameter were etched by a photolithographic process, using laser interference (24). Enterococcus hirae was used as a model organism because Gram-positive organisms are frequent pathogens and the contact killing behavior of E. hirae had previously been studied (23).…”
mentioning
confidence: 99%
“…In case of ns pulse laser systems, this can be realized by using beam splitters and mirrors as shown in Fig. 1 [11,12]. As shown in Fig.…”
Section: Resultsmentioning
confidence: 99%