Two-axis crosstalk analysis of gimbal-less MEMS scanners with consideration of rotational alignment

Kim, Kwang-Hyun; Moon, Seong-Yong; Kim, Jinhwan; Park, Yangkyu; Lee, Jong‐Hyun

doi:10.1016/j.measurement.2020.108785

Cited by 7 publications

(2 citation statements)

References 21 publications

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“…Figures 10(a The crosstalk due to using only four magnets resulted in a 3D point cloud which had two major problems. The most significant issue with the baseline model is the barrel distortion of the 3D point cloud which shows flat surfaces as curved structures [25]. This distortion is significantly higher in the four magnets configuration comparing to six magnets configuration.…”

Section: Testingmentioning

confidence: 99%

Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application

Ghazinouri

2023

J. Micromech. Microeng.

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This paper presents a novel design of a 2D electromagnetic micromirror without crosstalk. The proposed micromirror uses a flexible printed circuit board (FPCB) and four layers of coils embedded in the polyimide layers. The insulated layers of the coil allow for independent actuation of the mirror plate to rotate about two orthogonal axes. The diamond shaped micromirror uses a hyperbola-shaped magnetic field on the coils under the mirror plate and a 45-degrees magnetic field on the coils embedded in the FPCB frame to eliminate the mechanical crosstalk. Finite element analysis (FEA) was used to predict the novel 2D micromirror’s behavior. The novel 2D micromirror prototype is used in scanning LiDAR with good results. The experimental test has verified the novel crosstalk-free 2D micromirror working principle and showed good scanning quality: no crosstalk and a higher field of view. The novel 2D micromirror prototype has a large aperture: e.g., 19x19 mm2 , which is very suitable for coaxial scanning LIDAR.

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Section: Testingmentioning

confidence: 99%

Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application

Ghazinouri

2023

J. Micromech. Microeng.

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“…MEMS mirrors are known to exhibit inter-axis crosstalk in which the sensitivity of mirror tilt angle to applied voltage in the 𝑥 axis depends on the tilt angle in the 𝑦-axis and vice versa [34][35][36]. Using a similar MEMS scanner to the one in our system, Kim et al determined angular error during dual axis scanning due to crosstalk to be as high as 6.13% depending on MEMS scanner alignment [37]. Furthermore, the dependence of MEMS mirror angle on drive voltage is non-linear with mirror angle tending to saturate at the ends of the drive voltage range.…”

Section: Lateral Angular Distortion Correctionmentioning

confidence: 99%

Geometrically accurate real-time volumetric visualization of the middle ear using optical coherence tomography

Adamson¹,

Farrell²,

Wang³

et al. 2023

Preprint

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We introduce a novel system for geometrically accurate , continuous, live, volumetric middle ear optical coherence tomography imaging over a 13 mm × 30° × 30° field of view from a handheld imaging probe. The system employs a discretized spiral scanning (DC-SC) pattern to rapidly collect volumetric data and applies real-time scan conversion and lateral angular distortion correction to reduce geometric inaccuracies to below the system’s lateral resolution over 91% of the field of view. We validate the geometric accuracy of the resulting images through comparison with co-registered micro-computed tomography (micro-CT) volumes of a phantom target and a cadaveric middle ear. The system’s real-time volumetric imaging capabilities are assessed by imaging the ear of a healthy subject while performing dynamic pressurization of the middle ear in a Valsalva maneuver.

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Shaped input for reducing crosstalk of two-axis MEMS scanners

Kim¹,

Kim²,

Park³

et al. 2023

Sensors and Actuators A: Physical

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Two-axis crosstalk analysis of gimbal-less MEMS scanners with consideration of rotational alignment

Cited by 7 publications

References 21 publications

Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application

Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application

Geometrically accurate real-time volumetric visualization of the middle ear using optical coherence tomography

Shaped input for reducing crosstalk of two-axis MEMS scanners

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