2005
DOI: 10.1103/physrevb.72.045316
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Two-dimensional electron mobility limitation mechanisms inAlxGa1xNGaNheterostructures

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Cited by 189 publications
(99 citation statements)
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“…[7][8][9]29,35,36 The increments in mobility due to photoexcitation at a fixed temperature can be attributed to the increased electron mean energy with an increasing carrier density in the 2DEG channel, which leads to an improved screening and thereby reduced scattering between the 2DEG electrons with the ionized donor impurities. 24,29 The 9 These results show that there are considerable compressive strains that exist in our GaN layers due to the mismatch between the epilayers.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…[7][8][9]29,35,36 The increments in mobility due to photoexcitation at a fixed temperature can be attributed to the increased electron mean energy with an increasing carrier density in the 2DEG channel, which leads to an improved screening and thereby reduced scattering between the 2DEG electrons with the ionized donor impurities. 24,29 The 9 These results show that there are considerable compressive strains that exist in our GaN layers due to the mismatch between the epilayers.…”
Section: Resultsmentioning
confidence: 99%
“…35,36 After the deposition of these layers, a 20 nm thick undoped Al 0.20 Ga 0.80 N layer was grown on an AlN barrier layer at 1050°C and, finally, a 3 nm GaN cap layer was grown at the same temperature. At the beginning of the growth, the substrate was baked in H 2 ambient conditions at 1100°C for 5 min in order to remove the native oxide.…”
Section: Methodsmentioning
confidence: 99%
“…The AlN barrier layer was used to reduce the alloy disorder scattering by minimizing the wave function penetration from the 2DEG channel into the Al x Ga 1−x N layer. 15 After the deposition of these layers, a 23 nm thick undoped Al 0.22 Ga 0.78 N layer was grown on an AlN layer at 1050°C. Finally, a 5 nm thick GaN cap layer growth was carried out at a temperature of 1085°C and a pressure of 50 mbars.…”
Section: Methodsmentioning
confidence: 99%
“…While the mobility of sample series 1 is limited by increasing roughness correlated to the higher In content, the dominant scattering mechanisms for sample series 2 are different: the width and position of the 2DEG changes with varying 2DEG densities, which results in different dominant scattering mechanisms. 20 For densities above 7 9 10 12 cm À2 , the distance of the 2DEG from the interface becomes small, therefore interface scattering becomes the dominant mechanism here. For the samples of series 2, all of which have similar interface roughness, we observe exactly the aforementioned behavior.…”
Section: Resultsmentioning
confidence: 99%