Two-Dimensional Measurement of Groove Spacing for Plane VLS Gratings Using the Long Trace Profiler

Liu, Bin; Liu, Jun; Fu, Shao Jie; Xu, Xiang D.; Wang, Qiu P.

doi:10.1109/nems.2006.334839

Cited by 3 publications

(1 citation statement)

References 7 publications

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“…Much attention is paid on design, fabrication, optimization or practical application of VLS gratings in spectrograph and synchrotron radiation facilities [1]- [6]. Significantly fewer studies on the diffraction characteristics of VLS gratings have been proposed.…”

Section: Introductionmentioning

confidence: 99%

Diffraction spectrum of variable line space plane grating at oblique incidence

Luo

Liu

et al. 2010

SPIE Proceedings

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In this paper, a general scalar model to analyze the diffraction spectrum of holographic variable line space (VLS) plane grating at oblique incidence is proposed. The analytic expression for the diffraction spectrum of a VLS plane grating at oblique incidence with a parallel and uniform beam was obtained on the basis of Fraunhofer diffraction theory. And the applied scope of the analytic expression is that the grating period is much larger than the incident wavelength. Then some computing examples are given in the condition of single wavelength incident. This oblique incidence model can provide a theoretical reference for the real distribution of diffraction spectrum of holographic VLS plane grating. In future work, the diffraction efficiency and polarization state will be considered.

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Section: Introductionmentioning

confidence: 99%

Diffraction spectrum of variable line space plane grating at oblique incidence

Luo

Liu

et al. 2010

SPIE Proceedings

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Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology

Shimizu

2021

Nanomanuf Metrol

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Laser interference lithography is an attractive method for the fabrication of a large-area two-dimensional planar scale grating, which can be employed as a scale for multi-axis optical encoders or a diffractive optical element in many types of optical sensors. Especially, optical configurations such as Lloyd’s mirror interferometer based on the division of wavefront method can generate interference fringe fields for the patterning of grating pattern structures at a single exposure in a stable manner. For the fabrication of a two-dimensional scale grating to be used in a planar/surface encoder, an orthogonal two-axis Lloyd’s mirror interferometer, which has been realized through innovation to Lloyd’s mirror interferometer, has been developed. In addition, the concept of the patterning of the two-dimensional orthogonal pattern structure at a single exposure has been extended to the non-orthogonal two-axis Lloyd’s mirror interferometer. Furthermore, the optical setup for the non-orthogonal two-axis Lloyd’s mirror interferometer has been optimized for the fabrication of a large-area scale grating. In this review article, principles of generating interference fringe fields for the fabrication of a scale grating based on the interference lithography are reviewed, while focusing on the fabrication of a two-dimensional scale grating for planar/surface encoders. Verification of the pitch of the fabricated pattern structures, whose accuracy strongly affects the performance of planar/surface encoders, is also an important task to be addressed. In this paper, major methods for the evaluation of a grating pitch are also reviewed.

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A resolution improvement of measuring the pitch deviation of a diffraction scale grating based on the change in angles of diffraction of diffracted beams

KITAZUME,

SHIMIZU

2024

JAMDSM

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Two-Dimensional Measurement of Groove Spacing for Plane VLS Gratings Using the Long Trace Profiler

Cited by 3 publications

References 7 publications

Diffraction spectrum of variable line space plane grating at oblique incidence

Diffraction spectrum of variable line space plane grating at oblique incidence

Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology

A resolution improvement of measuring the pitch deviation of a diffraction scale grating based on the change in angles of diffraction of diffracted beams

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