Two-dimensional micro conveyer with integrated electrostatic actuators

Edo, Masaharu; Watanabe, Yasumasa; Morita, Osamu; Nakazawa, Hiroyuki; Yonezawa, E.

doi:10.1109/memsys.1999.746749

Cited by 13 publications

(6 citation statements)

References 5 publications

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“…As demonstrators, several microconveyance systems were built using the DMMS concept. They used either thermal actuators reproducing the ciliary movement occurring in living organisms [14], or an air flow controlled by multiple microvalves [20], [22] as well as electrostatic [23], [24] and magnetic [25] actuation. In such a system, the distributed actuators are fixed, and appropriate control is provided to move a micro object.…”

Section: Introductionmentioning

confidence: 99%

Complete System for Wireless Powering and Remote Control of Electrostatic Actuators by Inductive Coupling

Basset

Kaiser

Legrand

et al. 2007

IEEE/ASME Trans. Mechatron.

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Section: Introductionmentioning

confidence: 99%

Complete System for Wireless Powering and Remote Control of Electrostatic Actuators by Inductive Coupling

Basset

Kaiser

Legrand

et al. 2007

IEEE/ASME Trans. Mechatron.

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“…In array-driven ultrasonic micro-actuators [16], objects were conveyed by ultrasonic swing of the pillars array beneath. XY-plane transportation systems based on surface acoustic waves in piezoelectric substrate [17,18], 2-D micro conveyor based on electrostatic actuator [19,20], inchworm motors with bidirectional XY electrostatic actuators [21,22] or transportation system based on vibrations of a slider combined with wedge mechanism [23], etc.…”

Section: Solid-based Transportation Systemsmentioning

confidence: 99%

Micro Transportation Systems: A Review

Pham¹,

Dao²

2011

MME

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This paper summarized and reviewed recent studies of micro transportation systems (MTS) in the MEMS (Micro Electro-Mechanical System) field. Micro transportation systems can be identified and classified into three categories based on the contact types between the objects and the actuators (i.e. liquid-based, solid- based and air-bearing type). Their advantages and disadvantages were also analyzed and compared. The au- thors have proposed and developed three types of solid-based MTS utilizing electrostatic comb-drive actua- tors and ratchet mechanisms to drive the micro container in straight and curved paths. These MTSs have been fabricated with silicon-on-insulator (SOI)-MEMS technology and tested successfully. In the near future, MTSs can be applied in different fields such as medicine (to classify and test blood cells), in bioengineering (to capture, sort and combine bio-cells, DNA), or in micro robot systems

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“…A conveyor represents a mechanical equipment that allows the transportation and/or manipulation of various kinds of materials. The use of conveyors is profitable in many operations such as the transportation of imposing objects [17] or tiny and fragile components [7,4]. They are useful for their quick and efficient transportation with a wide variety Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page.…”

Section: Introductionmentioning

confidence: 99%

Multicriteria optimization in distributed micro-conveying platform

Mabed

Dedu

Skima

2017

Proceedings of the Symposium on Applied Computing

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In this paper, we study the optimal use of a conveying surface, called smart surface, using distributed microrobotic system that is designed to manipulate fragile micro objects. The smart surface is composed of a 2D array of decentralized micro-modules. Each micro-module is composed of a microactuator, a microsensor, computing and communication units. The cooperation among these micro-modules allows the micro-object to be accurately located and moved on the surface. We discuss in this paper the algorithmic solutions that allow the system to determine the best path to move an object from an initial to a target position in the surface. The optimality of the path is evaluated according to two different and complementary criteria corresponding to short and long term visions. The short term vision optimizes on the speed of conveyance. The long term vision optimizes on the lifespan of the system and maintenance issues. We describe the best way to deal with these two aspects and their impact on the smart surface performance. The results observed confirm the improvement of smart surface performance compared to a naive approach, with a gain in lifespan of up to 160% and good objects transfer times.

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Two-dimensional micro conveyer with integrated electrostatic actuators

Cited by 13 publications

References 5 publications

Complete System for Wireless Powering and Remote Control of Electrostatic Actuators by Inductive Coupling

Complete System for Wireless Powering and Remote Control of Electrostatic Actuators by Inductive Coupling

Micro Transportation Systems: A Review

Multicriteria optimization in distributed micro-conveying platform

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