Two-dimensional patterned nc-Si arrays in nanometer thick a-Si:H single layer

Feng, Qibo; Huang, Xin; Li, J; Li, W; Zou, Hecheng; Li, X.F; Chen, K.J

doi:10.1016/j.spmi.2004.04.005

Superlattices and Microstructures

2004

DOI: 10.1016/j.spmi.2004.04.005

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Two-dimensional patterned nc-Si arrays in nanometer thick a-Si:H single layer

Qibo Feng

Xin Huang

J Li

et al.

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2009

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“…A KrF excimer pulsed laser with wavelength 248 nm and pulse duration 30 ns is employed as a coherent laser beam source, which at normal incidence passes through a phase-shift grating, and then irradiates onto samples. Two kinds of phase-shift grating mask (PSGM), consisting of 1D and 2D periodic surface-relief structure, respectively, are used in our experiment [12]. All gratings are made on quartz plate.…”

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confidence: 99%

Charge storage and light emission properties of three dimension controllable Si nanostructures

Chen

Huang

et al. 2009

Phys. Status Solidi (c)

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Size controllable nanocrystalline silicon (nc‐Si) materials show novel electrical and optical characteristics of silicon quantum dots. Based on laser induced constrained crystallization principle, the one‐/two‐/three‐dimension (1D, 2D and 3D) ordered controllable nc‐Si array have been successfully obtained by using phase‐shifting grating mask combine with multilayer structures. The tunable photoluminescence (PL) and electro‐luminescence (EL) from this kind of nc‐Si films have been observed. The collective single‐electron resonant tunneling and charge storage in the uniform nc‐Si single layer have been studied by using I‐V and the C‐V measurement at room temperature. The double level charge storage in stacked nc‐Si layer based metal‐insulator‐semiconductor (MIS) structure has been demonstrated. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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confidence: 99%

Charge storage and light emission properties of three dimension controllable Si nanostructures

Chen

Huang

et al. 2009

Phys. Status Solidi (c)

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Two-dimensional patterned nc-Si arrays in nanometer thick a-Si:H single layer

Cited by 1 publication

References 8 publications

Charge storage and light emission properties of three dimension controllable Si nanostructures

Charge storage and light emission properties of three dimension controllable Si nanostructures

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