Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures

Djurić, Z.; Jokić, Ivana; Frantlović, Miloš; Radulović, K.

doi:10.1016/j.mee.2008.11.083

Cited by 4 publications

(8 citation statements)

References 7 publications

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“…Although theoretical considerations of TM, TF and AD noise in MEMS/NEMS were published in the literature [108,[110][111][112][113][114], a need for more comprehensive models of noise in MEMS/NEMS resonators and oscillators still exists. Further in this section, theoretic models of AD noise in RF MEMS/NEMS EM resonators and of phase noise in MEMS/NEMS oscillators, presented in our papers [113,[115][116][117][118][119][120][121][122][123], will be briefly reviewed, and then the results of the quantitative analysis will be given.…”

Section: Phase Noise In Rf Mems/nemsmentioning

confidence: 99%

“…i=1,2,...n, valid for different types of AD processes. Here, n1 is the total number of gases in the resonator surroundings whose particles adsorb in a single layer on the resonator surface [113,[115][116][117][118][119], or the total number of adsorbed layers in the case of multilayer single-gas adsorption [120,121]. The index "i" refers to i th gas in a gas mixture, or to the particles in the i th adsorbing layer (which are not covered by (i+1) th layer).…”

Section: Adsorption-desorption Noise In Mems/nems Resonatorsmentioning

confidence: 99%

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RF MEMS/NEMS resonators for wireless communication systems and adsorption-desorption phase noise

Jokić¹,

Frantlović²,

Đurić

et al. 2015

FACTA U EE

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During the past two decades a considerable effort has been made to develop radio-frequency (RF) resonators which are fabricated using the micro/nanoelectro-mechanical systems (MEMS/NEMS) technologies, in order to replace conventional large off-chip components in wireless transceivers and other high-speed electronic systems. The first part of the paper presents an overview of RF MEMS and NEMS resonators, including those based on two-dimensional crystals (e.g. graphene). The frequency tuning in MEMS/NEMS resonators is then analyzed. Improvements that would be necessary in order for MEMS/NEMS resonators to meet the requirements of wireless systems are also discussed. The analysis of noise of RF MEMS/NEMS resonators and oscillators is especially important in modern wireless communication systems due to increasingly stringent requirements regarding the acceptable noise level in every next generation. The second part of the paper presents the analysis of adsorption-desorption (AD) noise in RF MEMS/NEMS resonators, which becomes pronounced with the decrease of components' dimensions, and is not sufficiently elaborated in the existing literature about such components. Finally, a theoretical model of phase noise in RF MEMS/NEMS oscillators will be presented, with a special emphasize on the influence of the resonator AD noise on the oscillator phase noise. [Projekat Ministarstva nauke Republike Srbije, br. TR 32008]

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Section: Phase Noise In Rf Mems/nemsmentioning

confidence: 99%

Section: Adsorption-desorption Noise In Mems/nems Resonatorsmentioning

confidence: 99%

RF MEMS/NEMS resonators for wireless communication systems and adsorption-desorption phase noise

Jokić¹,

Frantlović²,

Đurić

et al. 2015

FACTA U EE

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“…Subsequently, theoretic models of AD noise were devised for different cases of gas adsorption on the surface of micro/nanostructures: adsorption of an arbitrary number of gases [27][28][29], adsorption in an arbitrary number of layers [30,31], and adsorption coupled with mass transfer [32]. All of them are based on the established analogy between AD processes and the coresponding GR processes.…”

Section: A Adsorption-desorption Noise In Mems/nems Resonatorsmentioning

confidence: 99%

“…The expression for the PSD of adsorbed mass fluctuations for the case of two-layer adsorption has the same form, but τ 1,2 and τ z depend on different parameters because the functions g ie and r ie are different [30].…”

Section: A Adsorption-desorption Noise In Mems/nems Resonatorsmentioning

confidence: 99%

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RF MEMS and NEMS components and adsorption-desorption induced phase noise

Jokić

Frantlović

Djurić

2014

2014 29th International Conference on Microelectronics Proceedings - MIEL 2014

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Radio frequency micro-and nanoelectromechanical systems (RF MEMS and RF NEMS) and technologies have a great potential to overcome the constraints of conventional IC technologies in realization of fully integrated transceivers of next generation wireless communications systems. During the last two decades a considerable effort has been made to develop RF MEMS/NEMS resonators so that they could replace conventional bulky off-chip resonators in wireless transceivers. In MEMS, and especially in NEMS resonators, additional noise generating mechanisms exist that are characteristic for structures of small dimensions and mass, and high surface to volume ratio. One such mechanism is the adsorption-desorption (AD) process that generates the resonator frequency (phase) noise. In the first part of this paper a short overview of RF MEMS resonators is given, including comments on the necessary improvements and the direction of future research in this field (especially having in mind the need for NEMS resonators), with the intention to optimize RF MEMS and NEMS components according to requirements of both current and future systems. The main part of the paper presents a comprehensive theory of AD noise in MEMS/NEMS resonators. Apart from having a theoretical significance, the derived models of AD noise in multiple different cases of adsorption are also a useful tool for the design of optimal performance RF MEMS and NEMS resonators. The model of the MEMS/NEMS oscillator phase noise that takes into account the influence of AD noise is presented for the first time.

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