2018
DOI: 10.1088/1361-6439/aaabf6
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Two-level bulk microfabrication of a mechanical broadband vibration amplitude-amplifier with ten coupled resonators

Abstract: A micromechanical broadband vibration amplitude-amplifier for low power detection of acoustic emission signals is presented. It is based on a coupled mass-spring system and was fabricated in a two-level bulk microfabrication process. The device consists of ten resonators coupled in series, which decrease in mass by a factor of three each, to achieve a high amplification over a broad bandwidth. The fabrication process for this multiscale device is based on front- and backside etching of a silicon-on-insulator w… Show more

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