The resonance enhanced multiphoton ionization (REMPI) of Si (CH3)4–nCln compounds (with n = 0, 1, 2, 3, 4) was measured in the 400–360 nm range. The resonances observed were attributed to a
silicon atom formed in the 1D2 excited state. This indicates that the first step in the photochemical process
is the dissociation of the molecule which is followed by the ionization of the silicon atom.