2009
DOI: 10.1002/lpor.200810027
|View full text |Cite
|
Sign up to set email alerts
|

Two‐photon stereolithography for realizing ultraprecise three‐dimensional nano/microdevices

Abstract: Two-photon stereolithography (TPS) provides many advantages for achieving two-dimensional (2D) and threedimensional (3D) micrometer-scale polymeric, ceramic and metallic structures applicable to complicated optical and neoelectronic microdevices. In the fabrication of high-resolution 3D microstructures, TPS has significant advantages over conventional microelectromechanical system (MEMS) processing, which involves time-consuming multistep indirect fabrication processes. Many studies have recently been made to … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

0
106
0

Year Published

2010
2010
2024
2024

Publication Types

Select...
5
5

Relationship

0
10

Authors

Journals

citations
Cited by 209 publications
(106 citation statements)
references
References 54 publications
0
106
0
Order By: Relevance
“…The most advanced technology for fabricating ultra-precise structures controlled at the cell scale is laser two-photon polymerization (2PP) [9,10]. This rapid prototyping technology allows the fabrication of polymeric structures of arbitrary 3-D geometry with a spatial resolution down to 100 nm [11].…”
Section: Introductionmentioning
confidence: 99%
“…The most advanced technology for fabricating ultra-precise structures controlled at the cell scale is laser two-photon polymerization (2PP) [9,10]. This rapid prototyping technology allows the fabrication of polymeric structures of arbitrary 3-D geometry with a spatial resolution down to 100 nm [11].…”
Section: Introductionmentioning
confidence: 99%
“…Recent advances in AM techniques have enabled the achievement of extremely high accuracies in manufacturing of medical devices. In this regard, high-resolution AM techniques 66 such as stereolithography 42 and two-photon polymerization 21,51,54 that could achieve accuracies in the range of a few microns, or sometimes submicron, play an important role. However, such applications of superhigh-resolution AM have not been fully explored yet.…”
Section: Medical Instrumentsmentioning
confidence: 99%
“…To date, numerous unique fabrication methods of microstructured surfaces have been developed, such as lithography (and subsequent surface etching) [6][7][8], casting [9,10], and others [11]. Among them, the electrodeposition method has received a great deal of attention owing to its many advantages.…”
Section: Introductionmentioning
confidence: 99%