Two-step etching method for fabrication of fibre probe for photon scanning tunnelling microscope

Pangaribuan, Togar; Jiang, Shudong; Ohtsu, Motoichi

doi:10.1049/el:19931317

Cited by 39 publications

(7 citation statements)

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“…Samples with pn-junctions and their Ohmic contacts were mounted on the homemade STM-EL sample holder. First, optical fiber is etched by buffered hydrofluoric acid according to the Ohtsu's method, 25,26 which forms a cone-shaped fiber core (bare FP) with a cone angle of 100 and a cone curvature radius of $40 nm. Luminescence from the sample is collected either by twin lenses or by FP and it passes through either a viewport or an optical fiber STM scanner, respectively.…”

Section: Methodsmentioning

confidence: 99%

Scanning tunneling microscope-based local electroluminescence spectroscopy of p-AlGaAs/i-GaAs/n-AlGaAs double heterostructure

Watanabe

Nakamura

Kuboya

et al. 2012

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Articles you may be interested inScanning tunneling microscope-cathodoluminescence measurement of the GaAs/AlGaAs heterostructure J.Local characterization of electroluminescence (EL) from working light-emitting devices is a key to developing and improving their EL properties. The authors developed a scanning tunneling microscope-(STM-) EL technique based on conductive optical fiber probe STM with homemade bipolar sample holder and we demonstrated spatially resolved STM-EL nanospectroscopy of p-AlGaAs/i-GaAs/n-AlGaAs double heterostructure (110) cross-sections. The lateral spatial resolution of the STM-EL measurement was evaluated to be about 0.9 lm, whose origin was attributed to far-field EL collection by the tapered core of the optical fiber probe. This lateral spatial resolution agrees with the estimated spatial resolution of 1.1 lm in lateral and 1.2 lm in depth.

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Section: Methodsmentioning

confidence: 99%

Scanning tunneling microscope-based local electroluminescence spectroscopy of p-AlGaAs/i-GaAs/n-AlGaAs double heterostructure

Watanabe

Nakamura

Kuboya

et al. 2012

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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“…With such a large ratio of d to h (i.e., d/h > 15), a tilt angle α of about 5°should bring the cladding edge into collision with the sample surface. To solve this problem, a two-step etching method was proposed (Pangaribuan et al 1993).…”

Section: Two-step Etching For Reducing the Cladding Diametermentioning

confidence: 99%

“…Some fabrication methods (Lieberman et al 1990, Pagnia et al 1990, Pohl et al 1984 have been reported, but sufficiently high reproducibility and detection efficiency have not yet been achieved and the tip diameter of the fabricated probe has not been small enough for resolving the nanometric scale structure of the sample. To solve these problems, a selective etching method using a buffered hydrofluoric (HF) acid as an etching solution has been applied to a single-mode fiber, fabricated by the vapor-phase axial deposition (VAD) method for fabricating the fiber probes (Jiang et al 1991;Pangaribuan et al 1992Pangaribuan et al , 1993. Based on this method, we present in this paper a highly controllable fabrication of fiber probes with nanometric tip diameters.…”

Section: Introductionmentioning

confidence: 99%

Highly controllable fabrication of fiber probe for photon scanning tunneling microscope

1994

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Summary: A selective chemical etching was used to fabricate fiber probes for the photon scanning tunneling microscope (PSTM). The cladding diameter of the fiber probe was controlled by varying the first-step etching time. The cone angle of the fiber probe tip was controlled by varying the doping ratio of the fiber and the composition of the etching solution. A cladding diameter of 8 µm and a tip diameter of about 3 nm were fabricated. The smallest cone angle was 14°.

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“…The probe can be made using a simple one-step selective etching process. [6][7][8] However, the probe has a very low mechanical a͒ Electronic mail: mni@umich.edu FIG. 1.…”

mentioning

confidence: 99%

“…The fiber is then etched between 3 and 6 h in buffered hydrofluoric acid. [6][7][8] Finally, the tip is coated with a 90-120 nm layer of aluminum using an evaporator ͑Denton Vacuum 502A͒. As shown schematically in Fig.…”

mentioning

confidence: 99%

High-efficiency and high-resolution fiber-optic probes for near field imaging and spectroscopy

Islam¹,

Zhao²,

Said³

et al. 1997

Applied Physics Letters

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Articles you may be interested inInstrumentation for dual-probe scanning near-field optical microscopy Rev. Sci. Instrum. 83, 083709 (2012); 10.1063/1.4737883 Simple fiber-optic confocal microscopy with nanoscale depth resolution beyond the diffraction barrier Rev. Sci. Instrum. 78, 093703 (2007); 10.1063/1.2777173 Fiber-optic coupled probe for scanning optically active materials Rev. Sci. Instrum. 69, 4234 (1998); 10.1063/1.1149236Highly efficient excitation of optical near-field on an apertured fiber probe with an asymmetric structure Reflection scanning near-field optical microscopy with uncoated fiber tips: How good is the resolution really?

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Two-step etching method for fabrication of fibre probe for photon scanning tunnelling microscope

Cited by 39 publications

References 1 publication

Scanning tunneling microscope-based local electroluminescence spectroscopy of p-AlGaAs/i-GaAs/n-AlGaAs double heterostructure

Scanning tunneling microscope-based local electroluminescence spectroscopy of p-AlGaAs/i-GaAs/n-AlGaAs double heterostructure

Highly controllable fabrication of fiber probe for photon scanning tunneling microscope

High-efficiency and high-resolution fiber-optic probes for near field imaging and spectroscopy

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