To improve the external quantum efficiency, high quality GaN film was grown on hemispherical patterned sapphire by controlling the V/III ratio during the initial growth stage. The luminous intensity of white flash light emitting diode (LED) grown on hemispherical patterned sapphire (HPS) was estinated to be 5.8 cd at a forward current of 150 mA, which is improved by 20 % more than that of LED grown on conventional sapphire substrate. The improvement of luminous intensity was explained by considering not only an increase of the extraction efficiency via the suppressed total internal reflection at the corrugated interface but also a decrease of dislocation density. 1 Introduction A great deal of research has been devoted to develop prominent solid-state light emitting diodes (LEDs) which are a prerequisite for practical applications in the area of liquid crystal display (LCD) back light, full color display, traffic display, and general illumination [1]. The white light LEDs are the most promising solid-state lighting method to replace the conventional incandescent and fluorescent lamps. It is well known that high density threading dislocations are inherent in the epitaxial GaN films on sapphire substrates due to the large difference in the lattice constant between the epitaxial layer and sapphire substrate. Therefore, how to further reduce the dislocation density is an important issue for fabricating high performance LEDs. Moreover the reflective index of nitride films is higher than that of air and the sapphire substrate. Most of the generated lights in the active layer is absorbed by the electrode at each reflection and gradually disappear due to total internal reflection (TIL). It has been reported that one can reduce the TIL by forming ordered micro-scale hexagonal or rectangular shaped pattern on sapphire substrate which effectively scatters the emission light from the active layer [2,3]. However, growth of high quality GaN film on patterned sapphire substrate is more difficult than that of conventional sapphire substrate (CSS). In order to improve the quality of GaN epitaxial layer, various growth techniques have been devised by adjusting growth parameters, such as III/V ratio, growth pressure, growth temperature, and annealing time [4,5].In this work, we proposed and investigated the metal organic chemical vapour deposition (MOCVD) growth of undoped GaN flims on a hemispherical patterned sapphire (HPS) substrate by controlling the V/III ratio during the initial growth stage. The fabricated white flash LEDs grown on HPS showed an improved luminous intensity and injection current due to both the reduction of the dislocation density and increase of the external efficiency compare to the samples grown on CSS.