Two-wavelength double heterodyne interferometry using a matched grating technique

Sodnik, Zoran; Fischer, Edgar; Ittner, Thomas; Tiziani, Hans J.

doi:10.1364/ao.30.003139

Cited by 52 publications

(7 citation statements)

References 6 publications

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“…A low frequency detection signal (f1 -f2) with a phase shift that compares to the effective wavelength is generated (10,11).…”

Section: Heterodyne Interferometrymentioning

confidence: 99%

<title>High-resolution optical surface topography measurements</title>

Tiziani

1994

SPIE Proceedings

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Optical methods are becoming interesting tools for high resolution surface topography measurements. Micro-and macrostructure measurements techniques were developed to measure surface topography with resolutions of one micrometer or better. The progress made in the last few years is due to the development of the laser and solid state detector elements together with very powerful computer support for the processing of information. Methods for optical surface topography measurements in particular based on the confocal principle and interferometry together with fu.ture trends and some limitations will be discussed.

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“…A low frequency detection signal (f1 -f2) with a phase shift that compares to the effective wavelength is generated (10,11).…”

Section: Heterodyne Interferometrymentioning

confidence: 99%

<title>High-resolution optical surface topography measurements</title>

Tiziani

1994

SPIE Proceedings

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“…The design principle of heterodyne interferometry is based on the dual frequency of a light source with two polarizations. There are several modulation methods that can be used to generate a heterodyne light source for heterodyne interferometry, including techniques such as the moving grating method, rotating plate method, acousto-optic modulator (AOM), electro-optic modulator (EOM), Zeeman laser, and so on [12][13][14]. The moving grating method and the rotating plate method are classified as mechanical-type modulators and are easily influenced by environmental disturbances.…”

Section: Introductionmentioning

confidence: 99%

Three-degree-of-freedom displacement measurement using grating-based heterodyne interferometry

Hsieh

Pan

2013

Appl. Opt.

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A heterodyne grating-based interferometer for three-degree-of-freedom (3-DOF) displacement measurement is proposed. This technique has the merits of both heterodyne interferometry and grating interferometry. A heterodyne light beam is obtained using an electro-optic modulating technique for amplitude modulation. While the heterodyne light beam is normally incident into a transmission-type 2D grating, two detection parts for in-plane and out-of-plane displacement measurements will be obtained. The heterodyne light beam is utilized to carry the optical phase variation that results from grating displacement in three directions. The experimental results demonstrate that the proposed interferometer is capable of sensing the displacement of a motion stage in 3-DOF. The resolution and range of the measurement can achieve up to nanometric and millimetric levels.

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“…Different types of TWI have been reported during the past several decades. The phases at a synthetic wavelength have been determined from the [19], the time-multiplexed technique [20], the phase-shifting technique [21], the three-color method [22], the sinusoidal phase-demodulated technique [23,24], the fractional fringe technique [25] or the Fourier-transform method [26]. A typical application of TWI is the measurement of a surface profile with height steps [27].…”

Section: Introductionmentioning

confidence: 99%

Dual-wavelength image-plane digital holography for dynamic measurement

Pedrini

Hennelly

et al. 2009

Optics and Lasers in Engineering

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a b s t r a c tA dual-wavelength image-plane digital holography, combined with a windowed Fourier analysis, is presented for dynamic measurement of a vibrating object. In order to expand the range of the velocity measurement, the object is simultaneously illuminated by two lasers with different wavelengths. A sequence of digital holograms of a vibrating object is captured by a CCD camera and two wrapped phase maps are retrieved from each digital hologram. At each instant, a new phase distribution with a synthetic wavelength is obtained by subtracting these two wrapped phase maps. A windowed Fourier analysis is then applied spatially and temporally to retrieve the high-precision displacement and velocity of the tested object. Experimental results show the requirement on the camera capture frequency is reduced by the proposed method.

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Two-wavelength double heterodyne interferometry using a matched grating technique

Abstract: Two-wavelength double heterodyne interferometry is applied for topographic measurements on optically rough target surfaces. A two-wavelength He-Ne laser and a matched grating technique are used to improve system stability and to simplify heterodyne frequency generation.

Cited by 52 publications

References 6 publications

<title>High-resolution optical surface topography measurements</title>

<title>High-resolution optical surface topography measurements</title>

Three-degree-of-freedom displacement measurement using grating-based heterodyne interferometry

Dual-wavelength image-plane digital holography for dynamic measurement

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