2021
DOI: 10.1364/oe.416871
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U-Net convolutional neural network-based modification method for precise fabrication of three-dimensional microstructures using laser direct writing lithography

Abstract: In this paper, a modification method based on a U-Net convolutional neural network is proposed for the precise fabrication of three-dimensional microstructures using laser direct writing lithography (LDWL). In order to build the correspondence between the exposure intensity distribution data imported to the laser direct writing system and the surface profile data of the actual fabricated microstructure, these two kinds of data are used as training tensors of the U-Net convolutional neural network, which is pro… Show more

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Cited by 7 publications
(2 citation statements)
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“…Despite the many advantages of satellite laser communication, it is very difficult to implement because it involves many interdisciplinary disciplines such as optical and mechanical computing, of which the targeting, capturing, and tracking technology is one of the difficult points [2]. e existing capture systems in the space link largely use the beacon light capture mode, which uses a wide beam beacon at the beginning of the scan capture; the beacon beam scattering angle is generally dozens of times the size of the signal beam scattering angle and then switch to signal light for tracking after the basic alignment of the two ends [3]. However, for the more demanding deep-space laser communication, the use of a large beam scatter angle of the capture beacon light will inevitably increase the output power of the system, resulting in the introduction of a large peak power consumption at the early stage of laser communication chain building.…”
Section: Introductionmentioning
confidence: 99%
“…Despite the many advantages of satellite laser communication, it is very difficult to implement because it involves many interdisciplinary disciplines such as optical and mechanical computing, of which the targeting, capturing, and tracking technology is one of the difficult points [2]. e existing capture systems in the space link largely use the beacon light capture mode, which uses a wide beam beacon at the beginning of the scan capture; the beacon beam scattering angle is generally dozens of times the size of the signal beam scattering angle and then switch to signal light for tracking after the basic alignment of the two ends [3]. However, for the more demanding deep-space laser communication, the use of a large beam scatter angle of the capture beacon light will inevitably increase the output power of the system, resulting in the introduction of a large peak power consumption at the early stage of laser communication chain building.…”
Section: Introductionmentioning
confidence: 99%
“…Figure 1c shows the compensation effect of 3D OPC, which improves the fidelity of the photoresist pattern by pre-distorting the CAD mask pattern and inserting assistant features around the structure. Recently, the model-based OPC has been proposed to improve the lithographic fidelity [27,28]; the regularization term with exposed dosage [29] and interior-point optimization with a barrier function [30] have been developed to accelerate optimization; and the neural network-based compensation method [31] has been researched for the prediction of CAD masks. All these methods provide superior theories for later generations and become essential to compensate for the undesired distortions of lithography, but the computational and storage efficiency is still unacceptable.…”
Section: Introductionmentioning
confidence: 99%