O-(Trimethylsiloxy)alkyl S-trimethyl-silyl aryldithiophosphonates 7a-d were obtained by the reaction of 2,4-diaryl-1,3,2,4-dithiadiphosphetane-2,4-disulfides 5a,b with disilyl derivatives of glycols 6a,c and salicyl alcohol 6b. The reactions of mixed O,S-bis(trimethylsilyl) 2, 4-di(3,5-di-tert-butyl-4-hydroxyphenyl)dithiophosphonate 1 and S-silyl aryldithiophosphonates 7a,b with S,S-diethyldithiodiphenylgermane 2, dichlorodiphenylgermane 8a, and dichlorodiphenylstannane 8b were studied. The structure of hexaphenyl-2,4,6,1,3,5-