Ultra-compact micro-coil realized via multilevel dense TSV coil for MEMs application

Li, H. Y.; Xie, Ling; Ong, L. G.; Baram, Adi; Herer, I.; Hirshberg, A.; Chong, Ser Choong; Kwong, D. L.

doi:10.1109/3dic.2012.6263008

Cited by 1 publication

(1 citation statement)

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“…The third option involves the patterning of microcoils, a choice that implies an increased level of complication in terms of both design and fabrication and is being actively pursued by many research groups [118][119][120][121]. The magnetic field generation requires an electrical current flow, which has a dramatic impact on the power dissipation and thermal budget characteristics of the manufactured components.…”

Section: Excitation Sourcesmentioning

confidence: 99%

Integrated Magnetic MEMS Relays: Status of the Technology

2014

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Abstract:The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.

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Section: Excitation Sourcesmentioning

confidence: 99%