Ultra-form finishing process for optical materials

Novel orthogonal velocity polishing tool and its material removal characteristics from CVD SiC mirror surfaces

“…The azimuth tool rotation also serves as a means to rotate the footprint so that the resulting material removal shape is pseudo Gaussian. To such extent that the rotation produces circularly symmetric pseudo Gaussian TIF while other existing methods [15][16][17] produce circularly non-symmetric TIF, the OVT method is in striking contrast to the other methods such as UFF process. The OVT wheel can be made with polishing cloths of various materials attached to a wheel substrate made of polyurethane, PVT or alternatively an inflatable rubber bag.…”

“…As mentioned in Section 2.1, OVT produces tool rotations at about two independent axes simultaneously. This is in contrast to other existing techniques [15][16][17]. The OVT is also capable of producing a pseudo Gaussian foot print of the material removal from the workpiece by either rotating or non-rotating ways.…”

“…Regarding the material removal characteristics of the polishing tool from the workpiece surface, circularly non-symmetric foot prints have been reported by previous studies [15][16][17]. One example is called Ultra-Form Finishing (UFF) process where a tool rotating about an axis is in contact with a spinning workpiece that rotates about an axis perpendicular to the tool rotation axis.…”