2018
DOI: 10.3390/app8071139
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Ultra-Low-Loss Silicon Waveguides for Heterogeneously Integrated Silicon/III-V Photonics

Abstract: Integrated ultra-low-loss waveguides are highly desired for integrated photonics to enable applications that require long delay lines, high-Q resonators, narrow filters, etc. Here, we present an ultra-low-loss silicon waveguide on 500 nm thick Silicon-On-Insulator (SOI) platform. Meter-scale delay lines, million-Q resonators and tens of picometer bandwidth grating filters are experimentally demonstrated. We design a low-loss low-reflection taper to seamlessly integrate the ultra-low-loss waveguide with standar… Show more

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Cited by 94 publications
(22 citation statements)
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“…In this design, κ is inversely proportional to the distance between the holes and the waveguide, which can be well controlled with lithography. The dependence between this distance and κ was previously simulated and experimentally verified [28]. Finally, the other component enabled by the ULL Si platform is the high-Q ring resonator, which was demonstrated to be as high as 4.1 million for intrinsic Q and 2.1 million for loaded Q.…”
Section: Laser Design a Ultralow-loss Silicon Platformmentioning
confidence: 68%
See 1 more Smart Citation
“…In this design, κ is inversely proportional to the distance between the holes and the waveguide, which can be well controlled with lithography. The dependence between this distance and κ was previously simulated and experimentally verified [28]. Finally, the other component enabled by the ULL Si platform is the high-Q ring resonator, which was demonstrated to be as high as 4.1 million for intrinsic Q and 2.1 million for loaded Q.…”
Section: Laser Design a Ultralow-loss Silicon Platformmentioning
confidence: 68%
“…For single TE-mode operation, the width of the waveguide should be kept under 2 μm. Further details regarding the development of this platform can be found in [28]. We compare several low-loss waveguide platforms based on foundry-compatible materials such as silicon, silicon nitride, and indium phosphide in Table 1.…”
Section: Laser Design a Ultralow-loss Silicon Platformmentioning
confidence: 99%
“…It is possible to integrate all components of the proposed ring resonator based MPBPF on a chip, reducing the overall footprint of the system, since the low-loss heterogeneous III-V/silicon laser [32], low half-wave voltage electro-optical modulator [33], and high-speed photodetectors are available on chip [30,34]. Moreover, the demonstrated RF bandpass filter has great potential in other applications, such as OEO [2,35] and microwave frequency measurement [36] compared with bandstop filters, due to the high passband gain and high spectral resolution.…”
Section: Discussionmentioning
confidence: 99%
“…20 By moving to more complicated waveguide geometries, silicon waveguides have been reported with losses below 3 dB/m. [21][22][23] Additionally, some approaches toward ultra-low-loss Si 3 N 4 waveguides have been reported demonstrating less than 1 dB/m loss. 24,25 Nevertheless, regardless of the technology, the propagation loss of an integrated photonic delay line is significantly higher than the ∼0.17 dB∕km propagation loss of commercial optical fiber.…”
Section: Concept For Achieving Short-term Stabilitymentioning
confidence: 99%