Ultra-low loss waveguide platform in silicon photonics

Bera, Arijit; Marin, Yisbel E.; Harjanne, Mikko; Cherchi, Matteo; Aalto, Timo

doi:10.1117/12.2610022

Cited by 11 publications

(7 citation statements)

References 6 publications

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“…However, for waveguides at this size scale preserving the shape and dimensions can be challenging [19]. We have previously demonstrated propagation losses of ~4 dB/m in strip waveguides on thick SOI through this process [23]. Here we exploit this result to demonstrate ultra-high Q resonators.…”

Section: Introductionmentioning

confidence: 88%

“…To estimate the intrinsic or loss Q, we need to know the propagation loss of the rib waveguides after hydrogen annealing smoothing. The losses measured for rib waveguides processed with TOX smoothing are 0.1 dB/cm [3], and we have also demonstrated a ×3 reduction of the propagation loss in strip waveguides through hydrogen annealing [23], therefore we assumed a loss for the ribs of ~0.03 dB/cm. From these estimations, we chose a total rib waveguide length Lrib = 11.6 mm for the large racetrack to obtain an estimated 13.77×10 6 intrinsic Q and free spectral range FSR = 5.3 GHz.…”

Section: Designmentioning

confidence: 98%

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Ultra-High-Q Racetrack Resonators on Thick SOI Platform Through Hydrogen Annealing Smoothing

Marin

Bera

Cherchi

et al. 2023

J. Lightwave Technol.

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We implemented a hydrogen annealing based postprocessing technique as a tool to improve the sidewall roughness of 3 μm thick silicon-on-insulator (SOI) waveguides and demonstrated ultra-high-Q factors on racetrack resonators leveraging on the propagation loss reduction achieved through the smoothing process. The designed racetracks are based on a combination of rib waveguides and strip-waveguide-based Euler bends. We measured intrinsic quality factors of 14×10 6 for a racetrack with a footprint of ~5.5 mm 2 and 10.7×10 6 for a smaller racetrack with footprint of ~1.48 mm 2 . The estimated propagation loss for the rib waveguides was ~2.7 dB/m, representing a ×3 reduction respect to the previously measured losses of 3 μm thick SOI rib waveguides treated with thermal oxidation smoothing. Overall, the post-processing technique allowed to significantly reduce the sidewall roughness without altering the geometry of the waveguides, unlike in sub-micron scale SOI platforms, making it an attractive solution for applications demanding ultra-low losses.

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Section: Introductionmentioning

confidence: 88%

Section: Designmentioning

confidence: 98%

Ultra-High-Q Racetrack Resonators on Thick SOI Platform Through Hydrogen Annealing Smoothing

Marin

Bera

Cherchi

et al. 2023

J. Lightwave Technol.

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“…The second platform is 3 µm thick SOI with a 1 µm BOX layer. This platform configuration has shown low propagation loss, low polarization dependency and ability to tolerate high power [22] as compared to the submicron Si waveguide. For this paper, fully etched straight waveguides, 2.5 µm wide, are fabricated in a single step process.…”

Section: Integration Platformsmentioning

confidence: 99%

Integration of Edge-Emitting Quantum Dot Lasers with Different Waveguide Platforms using Micro-Transfer Printing

Uzun

Atar

Iadanza

et al. 2023

IEEE J. Select. Topics Quantum Electron.

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O-band InAs/GaAs Quantum Dot edge-emitting lasers are integrated onto a number of waveguiding platforms using micro-transfer printing. These are deep recesses in 220 nm Si, 3 µm Si and 300 nm SiN waveguide circuits. The processing technology to achieve release and high-yield accurate transfer of laser coupons up to 2.4 mm long and < 5 µm thick onto the target substrates is described. At 85 mA, waveguide coupled powers of 1.0 mW and 0.95 mW are measured after out-coupling from the 220 nm SOI and 300 nm SiN waveguides, respectively while 1.7 mW total power was measured from the 3 µm SOI waveguide.

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“…[2][3][4][5][6] In this regard, the micron-scale silicon photonics platform 7 brings with it a unique set of properties and building blocks. This includes low propagation losses (down to 3 dB∕m demonstrated to date 8,9 ), broadband and low-loss coupling to fibers (≈0.5 dB), fast (>40 GHz) and responsive (≈1 A∕W) integrated germanium photodetectors, 10 upreflecting mirrors (URM) for broadband and low-loss coupling to arrays of detectors, tight bends 11 enabling high-integration density, efficient phase shifters, low-loss Mach-Zehnder interferometers, multimillion Q ring resonators, 9,12 polarization insensitive operation, and polarization splitters 13 and rotators, including all-silicon Faraday rotators (FRs). 14 A relevant example application is large-scale deployment of quantum key distribution (QKD), for which we are developing efficient multiplexed receivers.…”

Section: Introductionmentioning

confidence: 96%

Supporting quantum technologies with an ultralow-loss silicon photonics platform

et al. 2023

Self Cite

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Photonic integrated circuits (PICs) are expected to play a significant role in the ongoing second quantum revolution, thanks to their stability and scalability. Still, major upgrades are needed for available PIC platforms to meet the demanding requirements of quantum devices. We present a review of our recent progress in upgrading an unconventional silicon photonics platform toward this goal, including ultralow propagation losses, low-fiber coupling losses, integration of superconducting elements, Faraday rotators, fast and efficient detectors, and phase modulators with low-loss and/or low-energy consumption. We show the relevance of our developments and our vision in the main applications of quantum key distribution, to achieve significantly higher key rates and large-scale deployment; and cryogenic quantum computers, to replace electrical connections to the cryostat with optical fibers.

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Ultra-low loss waveguide platform in silicon photonics

Cited by 11 publications

References 6 publications

Ultra-High-Q Racetrack Resonators on Thick SOI Platform Through Hydrogen Annealing Smoothing

Ultra-High-Q Racetrack Resonators on Thick SOI Platform Through Hydrogen Annealing Smoothing

Integration of Edge-Emitting Quantum Dot Lasers with Different Waveguide Platforms using Micro-Transfer Printing

Supporting quantum technologies with an ultralow-loss silicon photonics platform

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