Ultra-precision grinding of monocrystalline silicon cylindrical mirror

Abstract

As one of the important functional components in the optical diagnosis system, the processing accuracy of monocrystalline silicon cylindrical mirror directly affects the overall performance of the entire experimental device. In order to obtain high-precision monocrystalline silicon cylindrical optical elements, the coordinate transfer function models of the diamond wheel in the cylindrical surface parallel grinding process were established, and the forming process scheme was proposed based on the wheel dressing precision and element grinding precision. At the end, the experiment for a monocrystalline silicon cylindrical mirror with size of 440mm × 50mm was carried out. The PV value of form error after grinding was about 2.7μm, which proved the correctness of the transfer function and the forming process scheme of monocrystalline silicon cylindrical optical element.