Ultra-shallow junction (USJ) sheet resistance measurements with a non-penetrating four point probe

Benjamin, Mark C.; Hillard, Robert; Borland, John

doi:10.1016/j.nimb.2005.05.040

Cited by 11 publications

(6 citation statements)

References 1 publication

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“…Next, let us consider the zero-penetration/non-contact techniques: (i) the elastic metal four point probe (EMP) from Solid State Measurements [7], (ii) the micro four point probe (M4PP) tool from CAPRES [8] and (iii) the sheet resistance and leakage (RsL) tool from Frontier Semiconductor [9]. EMP is a four point probe tool based on the usage of relatively large metal probes (load=25 g, contact size=30-50 µm, separation=1.8 mm), which make only an elastic contact with the sample/wafer, i.e.…”

Section: Sheet Resistancementioning

confidence: 99%

Accurate Sheet Resistance Measurement on Ultra-Shallow Profiles

et al. 2006

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The accurate and reliable characterization of the sheet resistance of ultra-shallow (USJ) profiles is a key issue in the development of future CMOS technologies. Typically, conventional means, such as in-line four point probe measurements, have a limited accuracy due to the substrate contribution resulting from too much probe penetration, especially in the presence of highly doped underlying layers (such as well/halo-profiles). In this work, a series of advanced Boron doped layers (132 nm down to 2 nm) have been grown with Chemical Vapor Deposition (CVD) on medium and lowly doped substrates and have been characterized with a large variety of state-of-the art non-penetrating/non-contact sheet resistance tools.

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Section: Sheet Resistancementioning

confidence: 99%

Accurate Sheet Resistance Measurement on Ultra-Shallow Profiles

et al. 2006

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“…The spring tip configuration (STC) consisted of four spring tip electrodes (spring probes; P19‐2221, Harwin, Portsmouth, UK; Fig. 3, right) 29–31. In this case, circular membranes with a diameter of 25 mm were used.…”

Section: Methodsmentioning

confidence: 99%

“…The proton conductivity for the STC [σ(STC)] and the PWC [σ(PWC)] was calculated as follows30, 33: where 𝓁 is the membrane thickness; | Z | −2°<φ<2° is the average impedance; correction factors f 1 and f 2 are the finite thickness and the finite width correction, respectively; W is the width of the membrane sample; and s is the distance between the inner electrodes. The conductivity determined with the STC is dependent on 𝓁 and | Z | −2°<φ<2° .…”

Section: Methodsmentioning

confidence: 99%

Behavior of sulfonated poly(ether ether ketone) in ethanol–water systems

Roelofs

Kampa

Hirth

et al. 2008

J of Applied Polymer Sci

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The behavior of sulfonated poly(ether ether ketone) (sPEEK) membranes in ethanol-water systems was studied for possible application in direct ethanol fuel cells (DEFCs). Polymer membranes with different degrees of sulfonation were tested by means of uptake, swelling, and ethanol transport with dynamic measurements (liquid-liquid and liquid-gas systems). Ethanol permeability was determined in an liquid-liquid diffusion cell. For membranes with an ion-exchange capacity (IEC) between 1.15 and 1.75 mmol/g, the ethanol permeability varied between 5 x 10(-8) and 1 x 10(-6) cm(2)/s, being dependent on the measuring temperature. Ethanol and water transport in liquid-gas systems was tested with pervaporation as a function of IEC and temperature. Higher IEC accounted for higher fluxes and lower water/ethanol selectivity. The temperature had a large effect on the fluxes, but the selectivity remained constant. Further-more, the membranes were characterized with proton conductivity measurements. The proton diffusion coefficient was calculated, and a transition in the proton transfer mechanism was found at a water number of 12. Membranes with high IEC (>1.6 mmol/g) exhibited larger proton diffusion coefficients in ethanol-water systems than in water systems. The membrane with the lowest IEC exhibited the best proton transport to ethanol permeability selectivity. The use of sPEEK membranes in DEFC systems depends on possible modifications to stabilize the membranes in the higher conductive region rather than on modifications to increase the proton conductivity in the stable region

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“…Probe penetration and junction leakage current are serious problems for ultra-shallow junctions, where it can lead to erroneous results. Modified contact techniques are the zero-penetration elastic metal four-point probe (EMP) 6 and the micro four point probe (M4PP). 7 EMP is a four-point probe with relatively large metal probes that make only elastic contacts leaving no imprints.…”

Section: Some Techniquesmentioning

confidence: 99%