Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI 2021
DOI: 10.1117/12.2585550
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Ultra-short pulses at high average power in the Laser MicroJet

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“…The 1064 nm wavelength laser is often used as a laser source in water-guided laser technology due to its stability, versatility, and easier implementation of high-power lasers, but the large absorption coefficient of water for 1064 nm wavelength laser leads to increased absorption of high-power laser energy in water, resulting in more Joule heat generation in the water jet, which can affect the perturbation of the water jet surface and make premature fragmentation of the water jet [5,6]. CHAJA et al developed a stable beam shaping device to optimize the intensity distribution profile of the laser beam before the high-power laser is focused into the water jet, to prevent high-power laser-induced water breakdown, and to effectively realize the coupling of high-power laser and water jet [7]. ZHANG et al proposed a new water-air contraction-guided high-power laser processing technique capable of directly coupling a high-power laser into a water jet and improving the stability of laser transmission [8].…”
Section: Introductionmentioning
confidence: 99%
“…The 1064 nm wavelength laser is often used as a laser source in water-guided laser technology due to its stability, versatility, and easier implementation of high-power lasers, but the large absorption coefficient of water for 1064 nm wavelength laser leads to increased absorption of high-power laser energy in water, resulting in more Joule heat generation in the water jet, which can affect the perturbation of the water jet surface and make premature fragmentation of the water jet [5,6]. CHAJA et al developed a stable beam shaping device to optimize the intensity distribution profile of the laser beam before the high-power laser is focused into the water jet, to prevent high-power laser-induced water breakdown, and to effectively realize the coupling of high-power laser and water jet [7]. ZHANG et al proposed a new water-air contraction-guided high-power laser processing technique capable of directly coupling a high-power laser into a water jet and improving the stability of laser transmission [8].…”
Section: Introductionmentioning
confidence: 99%