Ultra-smooth surface with 0.4 Å roughness on fused silica

Tan, Zhongqi; Jiang, Xiaowei; Mao, Yuanhao; Long, Xingwu; Luo, Hui

doi:10.1016/j.ceramint.2022.08.022

Cited by 12 publications

(2 citation statements)

References 32 publications

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“…For the first time, the origin of submicron flaws on the surface of fused silica was investigated based on the agglomeration strength of secondary CeO 2 particles, providing a foundation for the prediction of the quantity of surface defects. Z. Tan et al used various physical and chemical techniques to further reduce the size of polishing particles, improving the polishing liquid performance and consistently producing an ultra-smooth surface with roughness of 0.4 Å on fused silica [40]. Importantly, the experiment demonstrated that the densification process resulting from the longitudinal pressure in the polishing process enhanced the surface uniformity and promoted the creation of ultra-smooth surfaces.…”

Section: Chemical Mechanical Polishingmentioning

confidence: 99%

A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components

Li,

Xin,

Fan

et al. 2024

Micromachines

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Advancements in astronomical telescopes and cutting-edge technologies, including deep ultraviolet (DUV) and extreme ultraviolet (EUV) lithography, have escalated demands and imposed stringent surface quality requirements on optical system components. Achieving near-ideal optical components requires ultra-smooth surfaces with sub-nanometer roughness, no sub-surface damage, minimal surface defects, low residual stresses, and intact lattice integrity. This necessity has driven the rapid development and diversification of ultra-smooth surface fabrication technologies. This paper summarizes recent advances in ultra-smooth surface processing technologies, categorized by their material removal mechanisms. A subsequent comparative analysis evaluates the roughness and polishing characteristics of ultra-smooth surfaces processed on various materials, including fused silica, monocrystalline silicon, silicon carbide, and sapphire. To maximize each process’s advantages and achieve higher-quality surfaces, the paper discusses tailored processing methods and iterations for different materials. Finally, the paper anticipates future development trends in response to current challenges in ultra-smooth surface processing technology, providing a systematic reference for the study of the production of large-sized freeform surfaces.

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Section: Chemical Mechanical Polishingmentioning

confidence: 99%

A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components

Li,

Xin,

Fan

et al. 2024

Micromachines

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show abstract

“…Liang et al 22 proposed an ultrasonic-assisted vibration polishing method for polishing large optical lenses; a theoretical analysis and experiments were performed to determine the optimal conditions, which demonstrated that the surface roughness () reduced from 12 µm to 8 nm on a 300-mm diameter lens. Xu et al 23 and Tan et al 24 reported an ultra-smooth optical glass surface with values of 0.093 nm and 0.04 nm, respectively, using chemical mechanical polishing on a flat workpiece. Recently, Peng et al 25 proposed a series of layer-by-layer laser ablation processes to remove the defects and sub-surface damages in fused silica optics, which can achieve a nanoscale ablation depth and sub-nanometer surface roughness with a 65% improved laser-induced damage threshold compared to conventional processes.…”

Section: Introductionmentioning

confidence: 99%

Magnetic field-assisted batch polishing method for the mass production of precision optical glass components

Loh,

Wang,

Gao

et al. 2024

gxjzz

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The demand for optical glass has been rapidly increasing in various industries, where an ultra-smooth surface and form accuracy are critical for the functional elements of the applications. To meet the high surface-quality requirements, a polishing process is usually adopted to finish the optical glass surface to ensure an ultra-smooth surface and eliminate sub-surface damage. However, current ultra-precision polishing processes normally polish workpieces individually, leading to a low production efficiency and high polishing costs. Current mass-finishing methods cannot be used for optical glasses. Therefore, magnetic-field-assisted batch polishing (MABP) was proposed in this study to overcome this research gap and provide an efficient and cost-effective method for industrial use. A series of polishing experiments were conducted on typical optical components under different polishing parameters to evaluate the polishing performance of MABP on optical glasses. The results demonstrated that MABP is an efficient method to simultaneously polish multiple lenses while achieving a surface roughness, indicated by the arithmetic mean height (), of 0.7 nm and maintained a sub-micrometer surface form for all the workpieces.In addition, no apparent sub-surface damage was observed, indicating the significant potential for the high-quality rapid polishing of optical glasses. The proposed method is highly competitive compared to the current optical polishing methods, which has the potential to revolutionize the polishing process for small optics.

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Evolution of ring structures and method for inhibition in polishing of fused silica

Mu,

Gao,

Yan

et al. 2024

Applied Surface Science

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Ultra-smooth surface with 0.4 Å roughness on fused silica

Cited by 12 publications

References 32 publications

A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components

A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components

Magnetic field-assisted batch polishing method for the mass production of precision optical glass components

Evolution of ring structures and method for inhibition in polishing of fused silica

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