Ultra-thin benzocyclobutene bonding of InGaAs PIN photodetector onto silicon photonic chip

Research on single channel FMCW LiDAR integrated module

“…Laser and silicon optical chip coupled by lenses Balanced photodetector composed of two PIN photodetectors, which are bonded on silicon chip and receive two beams of light signal form on-chip mixer. Ultra-thin layer benzocyclobutene (BCB) was coated on silicon chip, and photodetectors are bonded on the surface of silicon by BCB bonding technology13 . Light emitted vertically from the optical gratings to back-illuminated photodetector, as shown in Figure3.…”