Ultra-thin on-chip ALD LiPON capacitors for high frequency application

Ahuja, Kunal Kumar; Sallaz, Valentin; Nuwayhid, R. Blake; Voiron, Frédéric; McCluskey, Patrick; Rubloff, Gary W.; Gregorczyk, Keith

doi:10.1016/j.jpowsour.2023.233056

Journal of Power Sources

2023

DOI: 10.1016/j.jpowsour.2023.233056

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Ultra-thin on-chip ALD LiPON capacitors for high frequency application

Kunal Kumar Ahuja

Valentin Sallaz

R. Blake Nuwayhid

et al.

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2024

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Cited by 4 publications

(1 citation statement)

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“…At the top of this list is lithium phosphorus oxynitride, LiP x O y N z (LiPON), − due to its many advantages such as its relatively high ionic conductivity, good electrochemical stability against Li metal, and low enough electronic conductivity. In addition to the aforementioned properties, thin LiPON films are transparent and can be deposited as part of flexible TFBs. , So far, a variety of advanced gas-phase thin-film deposition techniques have been adopted for the growth of LiPON films on planar substrates, including sputtering, − pulsed laser deposition (PLD), metal–organic chemical vapor deposition (CVD), and atomic layer deposition (ALD). ,− The line-of-sight operation mode in both sputtering , and PLD makes them unsuitable for complex 3D geometries. On the other hand, CVD techniquesespecially ALD, which is based on self-saturating surface reactionsare anticipated to yield uniform and conformal coatings on complex 3D structures with large ARs .…”

mentioning

confidence: 99%

Conformal High-Aspect-Ratio Solid Electrolyte Thin Films for Li-Ion Batteries by Atomic Layer Deposition

Madadi,

Heikkinen,

Philip

et al. 2024

ACS Appl. Electron. Mater.

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Lithium phosphorus oxynitride (LiPON) is a stateof-the-art solid electrolyte material for thin-film microbatteries. These applications require conformal thin films on challenging 3D surface structures, and among the advanced thin-film deposition techniques, atomic layer deposition (ALD) is believed to stand out in terms of producing appreciably conformal thin films. Here we quantify the conformality (i.e., the evenness of deposition) of thin ALD-grown LiPON films using lateral high-aspect-ratio test structures. Two different lithium precursors, lithium tert-butoxide (LiO t Bu) and lithium bis(trimethylsilyl)amide (Li-HMDS), were investigated in combination with diethyl phosphoramidate as the source of oxygen, phosphorus, and nitrogen. The results indicate that the film growth proceeded significantly deeper into the 3D cavities for the films grown from LiO t Bu, while the Li-HMDSbased films grew more evenly initially, right after the cavity entrances. These observations can be explained by differences in the precursor diffusion and reactivity. The results open possibilities for the use of LiPON as a solid electrolyte in batteries with highsurface-area electrodes. This could enable faster charging and discharging as well as the use of thin-film technology in fabricating thin-film electrodes of meaningful charge capacity.

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mentioning

confidence: 99%

Conformal High-Aspect-Ratio Solid Electrolyte Thin Films for Li-Ion Batteries by Atomic Layer Deposition

Madadi,

Heikkinen,

Philip

et al. 2024

ACS Appl. Electron. Mater.

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Lithium Phosphorous Oxynitride as an Advanced Solid‐State Electrolyte to Boost High‐Energy Lithium Metal Battery

Zou,

Xiao,

Lin

et al. 2024

Adv Funct Materials

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Lithium phosphorous oxynitride (LiPON) as one of the most successful solid‐state electrolytes (SSEs), has attracted great interest both in academia and technology due to its exceptional interfacial compatibility, broad electrochemical stability window, and excellent thermal stability, which enables the realization of extremely stable electrolyte/electrode interphase toward high‐energy density solid‐state lithium‐metal batteries (SSLMBs). However, insufficiency in ionic diffusion, mechanical robustness, and interfacial stability hinder its commercialization process. Herein, the characteristics of amorphous structure LiPON, fundamental understanding on the bulk ionic diffusion and electrode/electrolyte interface are systematically discussed, and the improvement strategies to boost the electrochemical performance are highlighted. Then, innovative characterization and computational methods help to unravel the design principle of LiPON are summarized. Furthermore, the approaches to realize high‐efficient preparation of LiPON are analyzed, followed by the investigation of present application of LiPON in current batteries. Finally, remaining challenges associated with the fundamental understanding and rational prediction of structure and interface design, high efficient preparation, and potential opportunities for future application of LiPON are properly prospected.

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High‐Throughput Experimentation Unveils Composition – Structure – Conductivity Relationships in the Extended LiPON System

Berthou,

Legallais,

Sorieul

et al. 2024

Advanced Energy Materials

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A high‐throughput experimental approach is developed to assess the correlations between chemical composition, structure and conduction properties of inorganic solid ionic conductors. This approach covers the preparation of a large number of samples by combinatorial synthesis, followed by fast characterization of the material library. The approach is primarily based on combinatorial synthesis by magnetron co‐sputtering and the characterization of thin film samples where lithium phosphorus oxynitride (LiPON) is chosen as a case study. A library of 76 LiPON materials is prepared in one experiment from the reactive co‐sputtering of LiPO3 and Li3PO4 in a N2 atmosphere. A specific sample design allows conducting thickness and impedance measurements, Raman spectroscopy, then fast and spatially‐resolved chemical analysis by Laser‐Induced Breakdown Spectroscopy (LIBS) on each material. Particular developments are devoted to this technique to achieve quantitative analysis of lithium in thin films. The materials cover a wide range of compositions with 0.95<Li/P<2.03 and a high N/P nitrogen content of ≈1.0‐1.2. Two distinct compositional ranges can be distinguished. For 0.95<Li/P<1.2, conductivity increases and the PO3− chains gradually disappear, whereas for 1.2<Li/P<2.03, conductivity stabilizes despite continuous structural evolution, in parallel with an increase in charge carrier concentration.

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Ultra-thin on-chip ALD LiPON capacitors for high frequency application

Cited by 4 publications

References 43 publications

Conformal High-Aspect-Ratio Solid Electrolyte Thin Films for Li-Ion Batteries by Atomic Layer Deposition

Conformal High-Aspect-Ratio Solid Electrolyte Thin Films for Li-Ion Batteries by Atomic Layer Deposition

Lithium Phosphorous Oxynitride as an Advanced Solid‐State Electrolyte to Boost High‐Energy Lithium Metal Battery

High‐Throughput Experimentation Unveils Composition – Structure – Conductivity Relationships in the Extended LiPON System

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