Carrier‐selective heterojunctions are important for low‐cost silicon‐based photovoltaic applications. A low temperature (<100 °C) chemical vapor deposition technique is used here to deposit ultrathin (n‐type) titanium dioxide (TiO2) layers onto hydrogen‐passivated surfaces of crystalline‐silicon (c‐Si). Energy level alignment and chemical composition at these abrupt, interfacial layer‐free TiO2/Si heterojunctions are investigated via ultraviolet, X‐ray, and inverse photoemission spectroscopy, for c‐Si doping ranging from p++(1019) to n++(1019). The interface Fermi level position and device‐relevant TiO2/Si band offsets are found to shift monotonically as a function of the Si doping, revealing the absence of Fermi level pinning at the c‐Si interface and pointing to simple Fermi level equilibration as the driving mechanism behind the interface energy level alignment. Electrical transport measurements performed on TiO2/Si‐based diodes confirm the energy level alignment yielded by spectroscopic measurements and the hole‐blocking properties of the TiO2/Si heterojunction, exclude hole conduction in the TiO2 as a transport mechanism, and show carrier recombination at the TiO2/p‐Si heterojunction.