Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides

Xin, Chenguang; Zhang, Zhongyao; Wang, Xuhu; Fan, Changjiang; Li, Mengwei

doi:10.1038/s41598-022-25760-8

Cited by 6 publications

(4 citation statements)

References 34 publications

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“…In Figure 17a,b, the adjustment occurs by perturbing the evanescent field of the optical mode in the bus waveguide, as described in [133]. In Figure 17c,d, the adjustment is achieved by directly altering the optical mode field distribution in the waveguide as a directional coupler that changes their geometric parameters [134][135][136]. Figure 17e,f depict a modulation mechanism in which the modification of the optical path length ensures low insertion losses, although the cost of a modulation speed is reduced by an order of magnitude [137].…”

Section: Mems-based Phase Shiftermentioning

confidence: 99%

Integrated Photonic Passive Building Blocks on Silicon-on-Insulator Platform

Amanti,

Andrini,

Armani

et al. 2024

Photonics

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Integrated photonics on Silicon-On-Insulator (SOI) substrates is a well developed research field that has already significantly impacted various fields, such as quantum computing, micro sensing devices, biosensing, and high-rate communications. Although quite complex circuits can be made with such technology, everything is based on a few ’building blocks’ which are then combined to form more complex circuits. This review article provides a detailed examination of the state of the art of integrated photonic building blocks focusing on passive elements, covering fundamental principles and design methodologies. Key components discussed include waveguides, fiber-to-chip couplers, edges and gratings, phase shifters, splitters and switches (including y-branch, MMI, and directional couplers), as well as subwavelength grating structures and ring resonators. Additionally, this review addresses challenges and future prospects in advancing integrated photonic circuits on SOI platforms, focusing on scalability, power efficiency, and fabrication issues. The objective of this review is to equip researchers and engineers in the field with a comprehensive understanding of the current landscape and future trajectories of integrated photonic components on SOI substrates with a 220 nm thick device layer of intrinsic silicon.

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Section: Mems-based Phase Shiftermentioning

confidence: 99%

Integrated Photonic Passive Building Blocks on Silicon-on-Insulator Platform

Amanti,

Andrini,

Armani

et al. 2024

Photonics

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“…In work [35], we presented the dependencies of the difference between the effective indices of the even and off modes of the gap that is inserted into Equation ( 5). More details on the selection of the displacement type of the moving waveguide and the optical measuring transducer working principle can be found elsewhere [9,32].…”

Section: Optical Measuring Transducersmentioning

confidence: 99%

“…Following the experimental data, the less was the measured range, the less was the nonlinearity of the obtained characteristic. The nonlinearity was calculated as Nonlinearity = P out + P outapprox P outapprox • 100%, (9) where P out is the output power, µW.…”

Section: Testing Of the Accelerometermentioning

confidence: 99%

“…Microoptoelectromechanical accelerometers have become increasingly popular in recent times because they incorporate the advantages of optical measurements and microelectromechanical systems. They are immune to electromagnetic noise, and they have high corrosion resistance, high sensitivity and a wide range of applications: high-precision inertial navigation, vibration monitoring, equipment monitoring, structure and vehicle monitoring, seismic exploration, and the oil industry [8][9][10][11][12][13][14].…”

Section: Introductionmentioning

confidence: 99%

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The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

Barbin,

Nesterenko,

Koleda

et al. 2024

Sensors

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This treatise studies a microoptoelectromechanical accelerometer (MOEMA) with an optical measuring transducer built according to the optical tunneling principle (evanescent coupling). The work discusses the design of the accelerometer’s microelectromechanical sensing element (MSE) and states the requirements for the design to achieve a sensitivity threshold of 1 µg m/s2 at a calculated eigenvalue of the MSE. The studies cover the selection of the dimensions, mass, eigenfrequency and corresponding stiffness of the spring suspension, gravity-induced cross-displacements. The authors propose and experimentally test an optical transducer positioning system represented by a capacitive actuator. This approach allows avoiding the restrictions in the fabrication of the transducer conditioned by the extremely high aspect ratio of deep silicon etching (more than 100). The designed MOEMA is tested on three manufactured prototypes. The experiments show that the sensitivity threshold of the accelerometers is 2 µg. For the dynamic range from minus 0.01 g to plus 0.01 g, the average nonlinearity of the accelerometers’ characteristics ranges from 0.7% to 1.62%. For the maximum dynamic range from minus 0.015 g to plus 0.05 g, the nonlinearity ranges from 2.34% to 2.9%, having the maximum deviation at the edges of the regions. The power gain of the three prototypes of accelerometers varies from 12.321 mW/g to 26.472 mW/g. The results provide broad prospects for the application of the proposed solutions in integrated inertial devices.

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The first distributed-mass high-performance programmable optoelectromechanical steerable motion-wave sensors focused on sophisticated biomedical applications

Hussein

2023

SN Appl. Sci.

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This paper introduces the first high-performance distributed-mass acoustic sensor made of cascaded differential phase shift suspended slot waveguide sections in a Mach–Zehnder interferometer optical transducer circuit. The heavyweight seismic mass used in traditional optoelectromechanical sensors is replaced by an fg lightweight coupling arm yielding an extra compact fast responding structure enabling utilizing over $$64$$ 64 cascaded sections and resulting in enhancing the performance by hundreds of times. The transducer operation relies on converting the acoustic vibration into phase modulation of the light for a splendid performance. The novel sensor architecture challenges achieving optical sensitivities higher than $$33\times {10}^{3} \%/\mathrm{g}$$ 33 × 10 3 % / g (33 times supersensitive), operating at ultrasonic acoustic speeds higher than 27 MHz, and recognizing resolutions in the 1 ng order. The programmable sensor is voltage-controlled supporting the operation in multimodes. Four operation modes are elucidated including the natural aspiration force, turbo electrostatic force open-loop voltage control, zero-force closed-loop voltage control, and dynamic turbo-force closed-loop voltage control. Wide dynamic ranges for controlling the optical sensitivity and maximum measurable acceleration up to 115.5 dB are reported. Steering capabilities of the acoustic beam in the azimuth plane are demonstrated utilizing two-spoke and three-spoke directional architectures supporting $$116.64^\circ$$ 116 . 64 ∘ and $$360^\circ$$ 360 ∘ of respective steering angles. Potential acoustic biosignal-based applications in the medical field are outlined.

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Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides

Cited by 6 publications

References 34 publications

Integrated Photonic Passive Building Blocks on Silicon-on-Insulator Platform

Integrated Photonic Passive Building Blocks on Silicon-on-Insulator Platform

The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

The first distributed-mass high-performance programmable optoelectromechanical steerable motion-wave sensors focused on sophisticated biomedical applications

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