2009
DOI: 10.1063/1.3123391
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Ultradense phosphorus in germanium delta-doped layers

Abstract: Phosphorus (P) in germanium (Ge) delta-doped layers are fabricated in ultrahigh vacuum by adsorption of phosphine molecules onto an atomically flat clean Ge(001) surface followed by thermal incorporation of P into the lattice and epitaxial Ge overgrowth by molecular beam epitaxy. Structural and electrical characterizations show that P atoms are confined, with minimal diffusion, into an ultranarrow 2-nm-wide layer with an electrically active sheet carrier concentration of 4x10(13) cm(-2) at 4.2 K. These results… Show more

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Cited by 48 publications
(64 citation statements)
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“…Second is the possibility of creating three dimensional systems starting from a suitable large band gap trivial insulator. The idea then is to place "impurity atoms", again with suitable orbitals and "friendly" chemistry with the host, not unlike the process of δ-doping of phosphorus in silicon [44]. The hybridization of the impurity orbitals would again produce a topological insulating state in the impurity bands under favorable conditions.…”
Section: Two Dimensional Systemsmentioning
confidence: 99%
“…Second is the possibility of creating three dimensional systems starting from a suitable large band gap trivial insulator. The idea then is to place "impurity atoms", again with suitable orbitals and "friendly" chemistry with the host, not unlike the process of δ-doping of phosphorus in silicon [44]. The hybridization of the impurity orbitals would again produce a topological insulating state in the impurity bands under favorable conditions.…”
Section: Two Dimensional Systemsmentioning
confidence: 99%
“…Carrying on from the success of the δ-doped Si:P fabrication route, δ-doped P in Ge (Ge:P) structures are now being fabricated on the nanometre scale utilising the same in situ doping techniques. 53,54 Presently, experiments are focused on highly doped Ge:P δ-layers [54][55][56] which could serve as the channel material in the next generation of high-speed nano-transistors.…”
Section: Application Of the Model To A Ge:p δ-Layermentioning
confidence: 99%
“…The electrical properties of the Mn 5 Ge 3 C x /Ge(111) Schottky contacts have been investigated in previous works giving a Schottky barrier (SB) height between 0.30 and 0.56 40 eV [10,11]. The value of the SB width can be tuned in order to reduce Fermi level pinning at the interface by creating an ultrashallow and ultranarrow high doped layer at the vicinity of the Mn 5 Ge 3 C x /Ge(111) interface [12,13]. Thus the growth process of the Mn 5 Ge 3 C x on the Ge(111) should preserve the ultrashallow layer.…”
mentioning
confidence: 99%