Ultrafast laser ablation of indium tin oxide thin films for organic light-emitting diode application

Park, Soo‐Jin; Chon, Byong Hyuk; Kim, Hyun Sun; Jeoung, Sae Chae; Kim, Dongho; Lee, Jeoung Ik; Chu, Hye Yong; Kim, Hyeong Rae

doi:10.1016/j.optlaseng.2005.03.009

Cited by 94 publications

(25 citation statements)

References 23 publications

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“…nanosecond [5][6][7][8]. Recently, femtosecond laser pulses for processing ITO thin film have been investigated with positive results [9][10][11][12], e.g. selectively removing the ITO and leaving the desired ITO pattern as transparent electrodes for devices.…”

Section: Introductionmentioning

confidence: 99%

Femtosecond laser processing of indium-tin-oxide thin films

Cheng

Lee

Chen

2015

Optics and Lasers in Engineering

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Section: Introductionmentioning

confidence: 99%

Femtosecond laser processing of indium-tin-oxide thin films

Cheng

Lee

Chen

2015

Optics and Lasers in Engineering

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“…The damage threshold of non-consolidated ITO layers which were mainly generated by vacuum deposition techniques like sputtering has been characterized for different laser systems by various groups. For example, M. Park et al (2006) investigated the damage threshold of ITO thin films with a thickness of 200 nm for organic light-emitting diode applications generated by vacuum deposition. The damage threshold was determined to be 0.07 J/cm 2 .…”

Section: Introductionmentioning

confidence: 99%

The Influence of Laser Induced Consolidation on the Ablation Threshold of Nanoparticulate ITO-layers

et al. 2014

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Indium tin oxide (ITO) is one of the few materials, which combines optical transparency in the wavelength range of visible light and electrical conductivity. It offers a wide range of applications in the field of optoelectronic devices such as solar cells or displays. To the present day, ITO is commonly deposited in a vacuum environment. Deposition under vacuum atmosphere is a cost-intensive process and not compatible with modern manufacturing techniques, like roll-to-roll processing. To overcome this limitation we propose the generation of ITO layers by deposition of ITO nanoparticles under atmospheric conditions. For the generation of functional devices structured layers are required. The exact damage threshold of nanoparticulate ITO layers is essential to minimize influence of the structuring process on the substrate. In our measurements we used three different substrates, spin coated layers, annealed layers and consolidated layers.

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“…More recently, one of the research focuses on carbon nanotubes has been placed on their application as a transparent thin film because the price of indium tin oxide (ITO) keeps increasing. ITO thin film has been used as a universal electrode in various optoelectronic devices such as organic light-emitting diodes [1], solar cells and liquidcrystal displays due to their high transmittance in the visible region and good electrical conductivity. The disadvantages of the ITO the film are high prices and electric conductivity changes when the film is bent.…”

Section: Introductionmentioning

confidence: 99%