Ultrafast laser micromachining and patterning of thermal spray multilayers for thermopile fabrication

Chen, Q; Longtin, Jon P.; Tankiewicz, S.; Sampath, Sanjay; Gambino, R. J.

doi:10.1088/0960-1317/14/4/010

Cited by 25 publications

(13 citation statements)

References 31 publications

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“…Various methods are used for the fabrication of modern thermoelectric microsensors (e.g., temperature [12,13], heat flux [14,15], thermal insolation [15,16,17], laser power [1,18,19], Seebeck nanoantennas for solar energy harvesting [20] or calorimeters [21]) and microgenerators [1,2,3,4,5,6,7,10,22,23,24,25,26,27]—classical semiconductor technology and silicon micromachining [1], volume micromachining [1,5,6,9,25] (where, for example, vapor phase soldering is used to improve solder joint quality and reliability of the various microgenerator parts [28]), plasma spraying and laser patterning [29,30], thin-film deposition (evaporation, magnetron sputtering, electrochemical deposition) [3,8,24,25,31], thick-film technology (planar, 3D, on flexible substrates, alumina or LTCC ones) [2,4,6,7,10,11,12,13,22,26,32,33,34,35]. …”

Section: Introductionmentioning

confidence: 99%

Thermoelectric Mixed Thick-/Thin Film Microgenerators Based on Constantan/Silver

2018

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This paper describes the design, manufacturing and characterization of newly developed mixed thick-/thin film thermoelectric microgenerators based on magnetron sputtered constantan (copper-nickel alloy) and screen-printed silver layers. The thermoelectric microgenerator consists of sixteen thermocouples made on a 34.2 × 27.5 × 0.25 mm3 alumina substrate. One of thermocouple arms was made of magnetron-sputtered constantan (Cu-Ni alloy), the second was a Ag-based screen-printed film. The length of each thermocouple arm was equal to 27 mm, and their width 0.3 mm. The distance between the arms was equal to 0.3 mm. In the first step, a pattern mask with thermocouples was designed and fabricated. Then, a constantan layer was magnetron sputtered over the whole substrate, and a photolithography process was used to prepare the first thermocouple arms. The second arms were screen-printed onto the substrate using a low-temperature silver paste (Heraeus C8829A or ElectroScience Laboratories ESL 599-E). To avoid oxidation of constantan, they were fired in a belt furnace in a nitrogen atmosphere at 550/450 °C peak firing temperature. Thermoelectric and electrical measurements were performed using the self-made measuring system. Two pyrometers included into the system were used for temperature measurement of hot and cold junctions. The estimated Seebeck coefficient, α was from the range 35 − 41 µV/K, whereas the total internal resistances R were between 250 and 3200 ohms, depending on magnetron sputtering time and kind of silver ink (the resistance of a single thermocouple was between 15.5 and 200 ohms).

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Section: Introductionmentioning

confidence: 99%

Thermoelectric Mixed Thick-/Thin Film Microgenerators Based on Constantan/Silver

2018

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“…The temperature difference across this layer is measured using a multi-element thermopile [25], as shown in Fig. 1, which is formed from an array of thermocouples on the upper and lower surfaces of the insulating layer.…”

Section: A Principle Of Operationmentioning

confidence: 99%

High-Temperature Calibration of Direct Write Heat Flux Sensors From 25 °C to 860 °C Using the In-Cavity Radiation Method

et al. 2015

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Heat flux sensors fabricated using Direct Write Thermal Spray are thin, surface-based devices that can operate at high temperatures. In this paper, Direct Write heat flux sensors are calibrated over a temperature range of 25°C-860°C. A substitution-based quartz lamp configuration is used to measure the steady-state sensitivity and transient response of Direct Write sensors at ambient temperatures, with repeatability confirmed over a 10-month period and after thermal aging. A matched heat flow approach is used to characterize the sensors at operating temperatures up to 860°C. The sensitivity is found to increase by a factor of two from 25°C to 650°C, after which it plateaus up to the maximum tested temperature of 860°C. A cubic polynomial calibration function captures the temperature dependence of the sensitivity and provides a good agreement for the measured data.Index Terms-Heat flux, heat flux sensor, high temperature, thermal sensor, heat flow sensor, thermopile.

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“…DW thermal spray has been used to successfully fabricate thermocouples, strain gages, antennas, and other devices for harsh environments directly from precursor metal and ceramic powders. In addition, DW thermal spray, combined with ultrafast laser micromachining, has been shown to be capable of fabricating thermopiles for power generation [16]. …”

Section: Thermal Spray Dwmentioning

confidence: 99%

“…DW approaches have been used to fabricate thermocouples, thermistors, magnetic flux sensors, strain gages, capacitive gages, crack detection sensors, accelerometers, pressure gages, and more [3,14,16,26].…”

Section: Applications Of Direct Write Technologiesmentioning

confidence: 99%

“…In addition, in every case where a conductive path is not possible between a power source and a deposited sensor, some form of local power generation is necessary. Several researchers have demonstrated the ability to create systems which use electromagnetic or thermopile power generation schemes using DW [16]. If designs for energy harvesting devices can be made robustly using DW, then the remote monitoring and sensing of components and parts is possible.…”

Section: Applications Of Direct Write Technologiesmentioning

confidence: 99%

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Direct Write Technologies

Gibson

Rosen

Stucker

2015

Additive Manufacturing Technologies

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The term "Direct Write" (DW) in its broadest sense can mean any technology which can create two-or three-dimensional functional structures directly onto flat or conformal surfaces in complex shapes, without any tooling or masks [1]. Although directed energy deposition, material jetting, material extrusion, and other AM processes fit this definition; for the purposes of distinguishing between the technologies discussed in this chapter and the technologies discussed elsewhere in this book, we will limit our definition of DW to those technologies which are designed to build freeform structures or electronics with feature resolution in one or more dimensions below 50 μm. This "small-scale" interpretation is how the term direct write is typically understood in the additive manufacturing community. Thus, for the purposes of this chapter, DW technologies are those processes which create meso-, micro-, and nanoscale structures using a freeform deposition tool.Although freeform surface modification using lasers and other treatments in some cases can be referred to as direct write [2] we will only discuss those technologies which add material to a surface. A more complete treatment of direct write technologies can be found in books dedicated to this topic [3].

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Ultrafast laser micromachining and patterning of thermal spray multilayers for thermopile fabrication

Cited by 25 publications

References 31 publications

Thermoelectric Mixed Thick-/Thin Film Microgenerators Based on Constantan/Silver

Thermoelectric Mixed Thick-/Thin Film Microgenerators Based on Constantan/Silver

High-Temperature Calibration of Direct Write Heat Flux Sensors From 25 °C to 860 °C Using the In-Cavity Radiation Method

Direct Write Technologies

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