1995
DOI: 10.1016/0925-4005(95)85122-4
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Ultrafine grain-size tin-oxide films for carbon monoxide monitoring in urban environments

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Cited by 60 publications
(17 citation statements)
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“…This mechanism results in a change of the film conductivity, which corresponds to the gas concentration. Although semiconductor metal-oxide gas sensors are promising, low selectivity, high-power consumption, and lack of long term stability have prevented their use in more demanding applications [8]. In the literature, there are several approaches to reduce these limitations, such as use of catalysts and promoters, multisensor array systems, optimization of sensors' operating temperature, and use of nanotechnology.…”
Section: Introductionmentioning
confidence: 99%
“…This mechanism results in a change of the film conductivity, which corresponds to the gas concentration. Although semiconductor metal-oxide gas sensors are promising, low selectivity, high-power consumption, and lack of long term stability have prevented their use in more demanding applications [8]. In the literature, there are several approaches to reduce these limitations, such as use of catalysts and promoters, multisensor array systems, optimization of sensors' operating temperature, and use of nanotechnology.…”
Section: Introductionmentioning
confidence: 99%
“…Magnetron sputtering allows one to vary the crystalline structure of the fi lm from amorphous to single crystal (epitaxial) just by changing the substrate temperature and the rate of deposition (LeGore et al 1997 ;Kissin et al 1999a ) , whereas the fi lm stoichiometry is driven by the amount of oxygen in the vacuum chamber (Williams and Coles 1993 ;DiGiulio et al 1996 ;Miccoci et al 1996 ;Kissin et al 1999b ) . The minimum crystallite size in the gas-sensitive polycrystalline MOX thin fi lms is now down to 3 nm (Barbi et al 1995 ) . According to Demarne and Grisel ( 1993 ) , DC magnetron sputtering allows one to use lower temperatures than radio-frequency sputtering, a de fi nite advantage for Si substrates.…”
Section: Thin-film Technologymentioning
confidence: 99%
“…Hübner and Obermeier (64) reported basic studies on semiconducting materials suitable for carbon monoxide sensing, and later Barbi et al (65) reported sensors for the monitoring of CO in urban environments [for carbon dioxide, see Kaneyasu et al (66) ]. Carbon monoxide is a highly toxic pollutant occurring mainly as a consequence of incomplete combustion processes.…”
Section: Conductivity Sensorsmentioning
confidence: 99%