Ultrahigh-vacuum organic molecular-beam deposition system for in situ growth and characterization

Abstract

A compact ultrahigh-vacuum molecular-beam deposition system has been developed for the in situ synthesis of organic thin films and multilayers. The system incorporates all the features (heater, thickness monitor, evaporators) necessary for controlled organic thin-film growth. It can be used independently, or it can be docked to the in situ growth system and transferred to other instruments of the PGM beamline, thus allowing extensive film preparation and characterization. A manipulator dedicated to specimen preparation and organic-film deposition with temperature control between 200 K and $800 K has been developed. The design and performance of the system are reported with emphasis on a novel solution of masks developed to achieve positiondependent film deposition. To demonstrate the enhanced capabilities of the PGM beamline in the growth and in the characterization of electronic-structure studies of organic molecular films and their heterostructures through synchrotron-based spectroscopies, this paper presents some preliminary results of a study of Fe-phthalocyanine growth on Si substrates and on in situ prepared La 0.67 Sr 0.33 MnO 3 buffer layers on SrTiO 3 single crystal.

High‐Resolution Crystal Truncation Rod Scattering: Application to Ultrathin Layers and Buried Interfaces

“…[ 234 ] In situ growth studies of metals and semiconductors using CTR scattering have a long history since the first measurements of Ge homoepitaxy via MBE by Vlieg et al [ 235 ] Homo‐ and heteroepitaxial MBE growth, [ 236–240 ] as well as metal‐organic vapor phase epitaxy (MOVPE) growth, [ 241–244 ] have been observed, leading to important basic insights into layer formation and morphology. Growth facilities built at synchrotron beamlines have enabled similar studies of complex oxide growth by MOVPE, [ 245,246 ] PLD, [ 247–250 ] and more recently, MBE, [ 232,251–253 ] revealing, for example, the tendency for certain layered structures to re‐arrange during growth [ 233,254 ] and the conditions under which oxygen defect structures are stabilized [ 100,255 ] (see Figure ). In addition to growth, in situ CTR measurements in heterogeneous environments have been carried out on crystalline‐gas [ 256 ] and crystalline‐liquid interfaces, [ 257–272 ] often relevant for geological and mineralogical studies.…”

Fe-Phthalocyanine Nanoclusters on La0.67Sr0.33MnO3 Ferromagnetic Substrate for Spintronics Application

“…The samples were prepared and characterized at the surface-science facility present at the U11-PGM beamline of the Brazilian Synchrotron Light Laboratory (LNLS), Brazilian Center for Research in Energy and Materials (CNPEM). The beamline is equipped with preparation chambers for the deposition of oxide thin films through pulsed laser deposition (PLD), metal films using molecular-beam epitaxy (MBE), and organic material by organic molecular-beam epitaxy (OMBE) equipped with a system of masks between evaporator and substrate . LSMO thin films were used as a support for FePc molecules.…”

“…The beamline is equipped with preparation chambers for the deposition of oxide thin films through pulsed laser deposition (PLD), metal films using molecular-beam epitaxy (MBE), and organic material by organic molecular-beam epitaxy (OMBE) equipped with a system of masks between evaporator and substrate. 29 LSMO thin films were used as a support for FePc molecules. The steps for film preparation are represented in Figure 1, and details can be found in ref 30 and 31.…”

Performances of Pentacene OFETs Deposited by Arbitrary Mounting Angle Vacuum Evaporator

“…An evaporator that could be mounted above the sample holder is much needed, as it would enable the FMM to be supported by the sample and avoids its deformation. In addition, for specific applications such as in situ analysis, the evaporator and analytic units have to be installed on the same side for real time measurements (Annese et al, 2018). Owing to the limited space in the bottom of the vacuum chamber, it would be beneficial to have an arbitrary mounting angle evaporator (AMAE), installed according to the position of analytic units.…”