2015
DOI: 10.1364/ao.54.005088
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Ultralong focal length microlens array fabricated based on SU-8 photoresist

Abstract: In this paper, a novel method to fabricate ultralong focal length microlens arrays has been proposed. The microlens arrays were fabricated based on surface tension when heating temperature is over a glass transition temperature of SU-8 photoresist. An ultralong focal length was achieved by the large radius of curvature of a photoresist surface. Microlenses of widths from 30 to 210 μm were successfully fabricated. The longest focal length was up to 4.4 mm from the microlens of 210 μm width. The formation mechan… Show more

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Cited by 11 publications
(4 citation statements)
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“…Therefore, based on previous studies on the parameters of reflowed‐photoresist microlenses (Ashraf et al, 2008; Pan & Su, 2008), a number of research efforts have been made to improve the fabrication process by thermal reflow of photoresist (Hsieh et al, 2011; Hsieh & Su, 2010; Jung & Jeong, 2015; Roy et al, 2009). Based on SU‐8 photoresist, Bian et al achieved an ultra‐long focal length of up to 4.4 mm through the large radius of curvature of the photoresist surface (Bian et al, 2015). Jucius et al (2016) changed the wettability of the substrate to achieve a change of contact angle in the range of 2°–76°, and obtained MLAs with different sizes.…”
Section: Microlenses Fabricating Techniquesmentioning
confidence: 99%
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“…Therefore, based on previous studies on the parameters of reflowed‐photoresist microlenses (Ashraf et al, 2008; Pan & Su, 2008), a number of research efforts have been made to improve the fabrication process by thermal reflow of photoresist (Hsieh et al, 2011; Hsieh & Su, 2010; Jung & Jeong, 2015; Roy et al, 2009). Based on SU‐8 photoresist, Bian et al achieved an ultra‐long focal length of up to 4.4 mm through the large radius of curvature of the photoresist surface (Bian et al, 2015). Jucius et al (2016) changed the wettability of the substrate to achieve a change of contact angle in the range of 2°–76°, and obtained MLAs with different sizes.…”
Section: Microlenses Fabricating Techniquesmentioning
confidence: 99%
“…Jucius et al (2016) changed the wettability of the substrate to achieve a change of contact angle in the range of 2°–76°, and obtained MLAs with different sizes. MLAs prepared by thermal reflow of photoresist is suitable as a mold, and the fixed pattern is transferred to a material with better optical performance after copying and molding (Bian et al, 2015; Cherng & Su, 2014; Feng et al, 2012).…”
Section: Microlenses Fabricating Techniquesmentioning
confidence: 99%
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“…A large number of reports in the literature described the application of MLAs onto the light extraction of OLEDs, a single photon source, , super-resolution imaging, upconversion luminescence, and ultrafast adaptive optics . MLAs can be fabricated by methods such as thermal photoresist reflow, laser direct writing, , inkjet droplets, , self-assembly method, optical μ-printing technology, and nanoimprint lithography . However, the research of MLAs for controlling scintillation luminescence is rare.…”
Section: Introductionmentioning
confidence: 99%