2022
DOI: 10.1002/lpor.202100292
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Ultralow‐Loss Silicon Photonics beyond the Singlemode Regime

Abstract: Silicon photonics beyond the singlemode regime is applied for enabling ultralow-loss waveguide propagation for the fundamental mode even without any special fabrication process. Here a micro-racetrack resonator is fabricated with a standard 220-nm-SOI (silicon-on-insulator) multiproject-wafer foundry and shows a record high intrinsic quality factor of 1.02×10 7 , corresponding to an ultralow propagation loss of only 0.065 dB cm −1 , which is about 20 times less than that of regular 450-nm-wide waveguides on th… Show more

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Cited by 76 publications
(31 citation statements)
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“…This problem can be solved by further boosting the Q factor of the microresonator in the integrated OEO. Therefore, the waveguide propagation loss should be further reduced by optimizing the design of the high- Q MRR 31 , 32 or by thermal oxidation of the Si waveguides 33 . Moreover, a fully integrated OEO, converging optical and electrical circuits, aims to develop chip-scale microwave photonic systems for generating microwave signals with low phase noise and wideband tunability.…”
Section: Resultsmentioning
confidence: 99%
“…This problem can be solved by further boosting the Q factor of the microresonator in the integrated OEO. Therefore, the waveguide propagation loss should be further reduced by optimizing the design of the high- Q MRR 31 , 32 or by thermal oxidation of the Si waveguides 33 . Moreover, a fully integrated OEO, converging optical and electrical circuits, aims to develop chip-scale microwave photonic systems for generating microwave signals with low phase noise and wideband tunability.…”
Section: Resultsmentioning
confidence: 99%
“…Thus, the optimal optical delay line would introduce less than 1 dB extra loss while significantly enhancing the ATR. Moreover, using multimode waveguides, the waveguide propagation loss can be further reduced, down to 0.065–0.25 dB/cm. , The time delay between the cavities can also be improved by engineering the connecting waveguide’s dispersion, e.g., by coupling the connecting waveguide with a passive cavity. The bandwidth of operation can be improved by incorporating efficient thermal tuners on the MRMs to tune the resonance locally.…”
Section: Discussionmentioning
confidence: 99%
“…For waveguides this wide, the field interaction with the sidewall roughness is greatly minimized, as it can be seen in Fig. 1.c, however the losses are still limited by the sidewall roughness, which could be improved by optimizing the fabrication methods [15]. A different configuration to avoid HOM excitation used MM concentric racetracks combined with a broadband directional coupler based on a pulley configuration demonstrating a Q-factor of 1.4 × 10 6 over a wavelength range from 1240 to 1680 nm.…”
Section: Introductionmentioning
confidence: 99%