“…However, the data of vacuum sensors are quite restricted for those functioning at low pressure, i.e., around 0.1 mbar. If we compare the S r ( P ) values from the different sensors, our sensor has 121% mbar –1 , which is lower compared to YVO 4 , but higher compared to the YPO 4 sensor, YAlO 3 perovskite-based sensor (microsphere), or NaYF 4 sensors, and molybdate Y 2 Mo 4 O 15 sensors . However, at a pressure of roughly 1 mbar, the produced sensor has S r ( P ) 10% mbar –1 , which is comparable to those of the vanadate molybdate and phosphate sensors.…”