ULTRARAM™: a low-energy, high-endurance, compound-semiconductor memory on silicon

Abstract

ULTRARAM is a non-volatile memory with the potential to achieve fast, ultralow-energy electron storage in a floating gate accessed through a triple-barrier resonant tunneling heterostructure. Here we report its implementation on a Si substrate; a vital step towards cost-effective mass production. Sample growth using molecular beam epitaxy commenced with deposition of an AlSb nucleation layer to seed the growth of a GaSb buffer layer, followed by the III-V memory epilayers. Fabricated single-cell memories show clear 0/1 logic-state contrast after ≤10-ms duration program/erase pulses of ~2.5 V, a remarkably fast switching speed for 10- and 20-µm devices. Furthermore, the combination of low voltage and small device capacitance per unit area results in a switching energy that is orders of magnitude lower than dynamic random access memory and flash, for a given cell size. Extended testing of devices revealed retention in excess of 1000 years, and degradation-free endurance of over 107 program/erase cycles, surpassing very recent results for similar devices on GaAs substrates.