2023
DOI: 10.1016/j.vacuum.2023.112125
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Ultrasensitive and flexible humidity sensors fabricated by ion beam sputtering and deposition from polydimethylsiloxane

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Cited by 9 publications
(7 citation statements)
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“…To further analyze the elemental composition and functional groups of the black film generated after laser irradiation of the composite surface, the high-resolution XPS spectra of C 1s, O 1s, and Si 2p of the black film were examined. The C 1s peak fitting spectra of the black film could be deconvoluted into five different peaks (Figure a) at 284.5, 285.2, 286.2, 287.8, and 289.2 eV, corresponding to C–C­(sp 2 ), C–C­(sp 3 ), C–O, CO, and O–CO, respectively. ,, Figure b shows that the fitting peak of the O 1s at 531.9 eV corresponded to Si–O and C–O. The fitting peak at 532.8 eV corresponded to SiO 2 and CO, with CO occupying only a small portion.…”
Section: Resultsmentioning
confidence: 99%
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“…To further analyze the elemental composition and functional groups of the black film generated after laser irradiation of the composite surface, the high-resolution XPS spectra of C 1s, O 1s, and Si 2p of the black film were examined. The C 1s peak fitting spectra of the black film could be deconvoluted into five different peaks (Figure a) at 284.5, 285.2, 286.2, 287.8, and 289.2 eV, corresponding to C–C­(sp 2 ), C–C­(sp 3 ), C–O, CO, and O–CO, respectively. ,, Figure b shows that the fitting peak of the O 1s at 531.9 eV corresponded to Si–O and C–O. The fitting peak at 532.8 eV corresponded to SiO 2 and CO, with CO occupying only a small portion.…”
Section: Resultsmentioning
confidence: 99%
“…The C 1s peak fitting spectra of the black film could be deconvoluted into five different peaks (Figure 6a) at 284.5, 285.2, 286.2, 287.8, and 289.2 eV, corresponding to C− C(sp 2 ), C−C(sp 3 ), C−O, C�O, and O−C�O, respectively. 35,53,54 Figure 6b shows that the fitting peak of the O 1s at 531.9 eV corresponded to Si−O and C−O. The fitting peak at 532.8 eV corresponded to SiO 2 and C�O, with C�O occupying only a small portion.…”
Section: Characterization 321 Morphological Analysismentioning
confidence: 98%
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“…This demand has led to increased attention from researchers toward developing electronic devices that possess favorable properties, such as bendability, malleability, and facile functionalization. Numerous investigations have been conducted on flexible electronics, including electronic skins, , flexible sensors, smart fabrics, stretchable circuits, and supercapacitors. , These studies have highlighted the vast potential of flexible electronics in various fields, such as health monitoring, motion sensing, and artificial intelligence. , …”
Section: Introductionmentioning
confidence: 99%
“…14,15 The core parts of the above electronics are usually flexible, stretchable, and lightweight sensors and conductors in various forms. 16–30 Flexible fibres with excellent properties are suitable for wearable devices and have attracted extensive research attention as they can be easily woven into clothes or gloves. Numerous innovative studies on such fibres have been reported, for applications as supercapacitors, 31–35 stretchable wires, 36–38 and strain sensors.…”
Section: Introductionmentioning
confidence: 99%