Ultrasonic micromotors: physics and applications

Moroney, R.M.; White, Richard M.; Howe, Roger T.

doi:10.1109/memsys.1990.110273

Cited by 26 publications

(8 citation statements)

References 11 publications

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“…Standing deflection waves, travelling waves or Lamb waves have been explored for micromotors [1,2] and micro-pumps [3]. Acoustic applications have also been investigated [4].…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions

Muralt

Kholkin

Köhli

et al. 1996

Sensors and Actuators A: Physical

180

100

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The piezoelectric response of silicon diaphragms covered with sputter-deposited PbZr 0.45 Ti 0.55 O 3 (PZT) films has been investigated in view of their application in ultrasonic micro-actuators. The behaviour of resonance frequencies and quasistatic deflections has been studied as a function of membrane thickness and d.c. bias. The total stress in the films and the piezoelectric constant, d 31 , have been derived by means of two different methods. The results are consistent with direct strain measurements by optical interferometry and with bulk ceramic values of identical composition.

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“…Standing deflection waves, travelling waves or Lamb waves have been explored for micromotors [1,2] and micro-pumps [3]. Acoustic applications have also been investigated [4].…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions

Muralt

Kholkin

Köhli

et al. 1996

Sensors and Actuators A: Physical

180

100

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“…Since a kind of ultrasonic micro-motors driven by Lamb waves with high frequencies excited by IDT was reported in 1989 (Moroney et al, 1989), several kinds of SAW motors driven by Rayleigh waves excited by IDTs have been developed. The first prototype of SAW linear motors was presented by Kurosawa et al, in which two pairs of IDTs with the central frequency about 10 MHz were prepared perpendicularly on a piezoelectric substrate, then two Rayleigh waves were excited in cross directions and a two-dimensional SAW motor was built-up (Kurosawa et al, 1994;1996).…”

Section: Conventional Saw Motorsmentioning

confidence: 99%

“…An initial micromotor using a Lamb wave (flexural plate wave) has been presented, in which the stator is a ZnO film (1µm) deposited on Si 3 O 4 film (2 µm) and both films are deposited on a Si wafer, and then the related area of Si wafer is etched as shown in Fig.15 (Moroney et al, 1989). A small polysilicon slice put on the Si 3 O 4 film is driven by the Lamb wave excited by IDT fabricated on the ZnO film, the polysilicon slice can move linearly or rotationally as the Lamb waves are excited or reflected in different directions.…”

Section: Microactuators Driven By Lamb Wavesmentioning

confidence: 99%

Surface Acoustic Wave Motors and Actuators: Structure, Mechanism, Characteristic and Application

Zhang¹,

Cheng²

2010

Acoustic Waves

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“…The rotor is fabricated by rather classical means and added in an assembly step. In the past three years the first piezoelectric thin film micromotors of this type have been demonstrated [2][3][4][5]. With regard to bulk material properties, PbZr x Ti 1-x O 3 (PZT) appears to be the best choice for the piezoelectric film.…”

Section: Introductionmentioning

confidence: 99%

“…The high deposition or annealing temperatures of about 600°C are usually not compatible with other materials on the device and interdiffusion and/or delamination may occur. For this reason the first micromotors have either been fabricated with the much less effective piezoelectric ZnO [2,5], or, when PZT films have been applied, suffered a very fast degradation, preventing a characterization of the motor [3,4].…”

Section: Introductionmentioning

confidence: 99%

Fabrication and characterization of PZT thin films for micromotors

Muralt

Kholkin

Köhli

et al. 1995

Integrated Ferroelectrics

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Piezoelectric membranes consisting of PbZr x Ti 1-x O 3 (PZT) films on silicon diaphragms have been fabricated, investigated, and applied for micromotors. The PZT films were deposited by sputtering and sol gel techniques. Resonance amplitudes of up to 1000 nm/V have been measured for 16 µm thick, 2 mm diameter membranes with 0.6 µm PZT. The PZT films show a preferred direction of polarization, which seems to depend on the deposition technique. Membranes of 4 mm diameter have been successfully applied as a vibrator of a micro motor, allowing for the first time the characterization of a PZT thin film micro motor. The motor could be operated with voltages as low as 1.0 Vrms, which is much less than has been obtained with ZnO micro motors and is sufficiently low for standard battery and IC supply voltages. A 100 h degradation test of frequency and amplitude has revealed a 5 % drop in amplitude, possibly due to depolarization.

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Ultrasonic micromotors: physics and applications

Cited by 26 publications

References 11 publications

Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions

Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions

Surface Acoustic Wave Motors and Actuators: Structure, Mechanism, Characteristic and Application

Fabrication and characterization of PZT thin films for micromotors

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