2013
DOI: 10.1117/12.2016460
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Ultrasonic processing of hard materials for conformal optics

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“…Many studies on zirconia, alumina, silicon nitride and optical ceramics showed that an ultra-precision machining operation without brittle fractures could be obtained by applying ultrasonic vibration on cutting tools [1,24,109,125,126]. However, no work indicated that the ductile mode machining could be achieved.…”
Section: Ceramicsmentioning
confidence: 99%
“…Many studies on zirconia, alumina, silicon nitride and optical ceramics showed that an ultra-precision machining operation without brittle fractures could be obtained by applying ultrasonic vibration on cutting tools [1,24,109,125,126]. However, no work indicated that the ductile mode machining could be achieved.…”
Section: Ceramicsmentioning
confidence: 99%