2011
DOI: 10.7567/jjap.50.020204
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Ultrasonic Spray-Assisted Solution-Based Vapor-Deposition of Aluminum Tris(8-hydroxyquinoline) Thin Films

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Cited by 9 publications
(7 citation statements)
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“…The choice of solvent is an initial but critical issue for solution processing technique, because a considerable amount of organic small molecules need to be able to be dissolved into it. Figure a shows the molecular structure of Alq 3 , the common solvents reported in literature for which are chloroform and acetone, which have a high polarity index of 4.1 and 5.1, respectively. However, both of these options have some inevitable technical drawbacks.…”
Section: Resultsmentioning
confidence: 99%
“…The choice of solvent is an initial but critical issue for solution processing technique, because a considerable amount of organic small molecules need to be able to be dissolved into it. Figure a shows the molecular structure of Alq 3 , the common solvents reported in literature for which are chloroform and acetone, which have a high polarity index of 4.1 and 5.1, respectively. However, both of these options have some inevitable technical drawbacks.…”
Section: Resultsmentioning
confidence: 99%
“…This means that the optimum substrate temperature is 200 °C under the present values of other deposition conditions (concentration of AlQ 3 , gas flow rate, etc.). The optimum substrate temperature is quite different, that is, higher, compared to that (140–160 °C) for the deposition on glass substrates 10. Referring the model proposed as the deposition process 10, it is considered that the rougher substrate surface of ITO compared to glass obstructed the migration of AlQ 3 sources on the substrate surface.…”
Section: Resultsmentioning
confidence: 99%
“…In our previous study, we demonstrated successful formation of AlQ 3 thin films on glass substrates using a solution‐based vapor deposition method, that is, the ultrasonic‐assisted mist deposition method 10. Efforts were made to prepare a solution of AlQ 3 in methanol, which is cheaper and more environmental‐friendly than tetrahydrofuran or dichloroethane reported in Refs.…”
Section: Introductionmentioning
confidence: 99%
“…For the deposition of organic thin films, we prepare organic solutions of the target material. The mist particles reach above the substrate surface, where the solution is vaporized and the solute remains on the substrate [3]. This mechanism is the vaporized deposition mode similar to spin-coating.…”
Section: Deposition Technologymentioning
confidence: 99%
“…For single-crystalline oxide semiconductors, layer-by-layer growth of ZnO, which has been difficult by MOCVD, was successfully achieved [3]. The electron mobility close to 100 cm 2 /Vs was realized.…”
Section: Single Crystalline Oxidesmentioning
confidence: 99%