[1991] Proceedings. IEEE Micro Electro Mechanical Systems
DOI: 10.1109/memsys.1991.114810
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Ultrasonically induced microtransport

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Cited by 75 publications
(53 citation statements)
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“…The electrokinetic micropump is the basis of capillary microelectrichromatography which has seen a tremendous progress in science as well as in commercialization during the last several years, mainly pushed by the concept of the lab on a chip. RF and ultrasonic pumping exploit the dragging force of a progressive mechanical wave [5] or the quartz wind of a vertically oscillating surface [6] which are excited at a liquid-solid interface, e.g. the sidewall or the end wall of a microchannel.…”
Section: Introductionmentioning
confidence: 99%
“…The electrokinetic micropump is the basis of capillary microelectrichromatography which has seen a tremendous progress in science as well as in commercialization during the last several years, mainly pushed by the concept of the lab on a chip. RF and ultrasonic pumping exploit the dragging force of a progressive mechanical wave [5] or the quartz wind of a vertically oscillating surface [6] which are excited at a liquid-solid interface, e.g. the sidewall or the end wall of a microchannel.…”
Section: Introductionmentioning
confidence: 99%
“…(Fowler et al 2002 Ó IEEE) 2.6 Acoustic wave or vibration type Although, to the author's knowledge, the amount of research is highly limited, there exist acoustic-wave or vibration-type micropumps. Moroney et al (1991) proposed an ultrasonically induced (standing Lamb wave) microtransport system, while Miyazaki et al (1991) describe a piezoelectric pump driven by a flexural progressive wave.…”
Section: Electrohydrodynamic (Ehd) Typementioning
confidence: 99%
“…These actuators can be categorized into two types; mechanical and nonmechanical actuators. For the mechanical actuators, check-valves, peristaltic valveless rectification, rotary, ultrasonic, and centrifugal pumps have been developed (Laser and Santiago 2004;van Lintel et al 1998;Smits 1998;Stemme and Stemme 1993;Doepper et al 1997;Ahn and Allen 1995;Moroney et al 1991;Oh and Ahn 2006). Examples of nonmechanical actuators include electro-osmosis, electrohydrodynamic, electrophoresis, dielectrophoresis, ferrofluidic, and magnetohydrodynamic pumps (Manz et al 1994;Bart et al 1990;Gunji et al 2001;Hatch et al 2001;Lemoff and Lee 2000).…”
Section: Introductionmentioning
confidence: 99%